Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009245864> ?p ?o ?g. }
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- W2009245864 endingPage "235" @default.
- W2009245864 startingPage "231" @default.
- W2009245864 abstract "We have characterized by multiangle spectroscopic ellipsometry the interface structure of silicon oxide plasma deposited on 〈111〉 p-type InSb substrates. Measurements have been performed with a step of 10 nm in the 400–800 nm spectral range for different angles of incidence between 40° and 80° with a 5° step. This large set of experimental data is used for solving the inverse ellipsometric problem with different structure models. Minimization procedures and merit function have been discussed. The layered structure from the best-fit model fits well the elemental distribution obtained from Auger analysis. The comparison of the dispersion of the optical constants of bulk InSb obtained on the basis of this model with the available literature data also reveals good agreement." @default.
- W2009245864 created "2016-06-24" @default.
- W2009245864 creator A5010132928 @default.
- W2009245864 creator A5057246282 @default.
- W2009245864 creator A5068131320 @default.
- W2009245864 date "1993-10-01" @default.
- W2009245864 modified "2023-10-16" @default.
- W2009245864 title "Investigation of the system InSbSiO2 by spectroscopic multiangle ellipsometry" @default.
- W2009245864 cites W1967254678 @default.
- W2009245864 cites W1973071426 @default.
- W2009245864 cites W1982634418 @default.
- W2009245864 cites W1987727871 @default.
- W2009245864 cites W2025764195 @default.
- W2009245864 cites W2028306588 @default.
- W2009245864 cites W2033839764 @default.
- W2009245864 cites W2045140475 @default.
- W2009245864 cites W2046096144 @default.
- W2009245864 cites W2065662116 @default.
- W2009245864 cites W2068175095 @default.
- W2009245864 cites W2073369784 @default.
- W2009245864 cites W2090756109 @default.
- W2009245864 cites W2169936070 @default.
- W2009245864 doi "https://doi.org/10.1016/0040-6090(93)90097-9" @default.
- W2009245864 hasPublicationYear "1993" @default.
- W2009245864 type Work @default.
- W2009245864 sameAs 2009245864 @default.
- W2009245864 citedByCount "8" @default.
- W2009245864 crossrefType "journal-article" @default.
- W2009245864 hasAuthorship W2009245864A5010132928 @default.
- W2009245864 hasAuthorship W2009245864A5057246282 @default.
- W2009245864 hasAuthorship W2009245864A5068131320 @default.
- W2009245864 hasConcept C113196181 @default.
- W2009245864 hasConcept C120665830 @default.
- W2009245864 hasConcept C121332964 @default.
- W2009245864 hasConcept C171250308 @default.
- W2009245864 hasConcept C177562468 @default.
- W2009245864 hasConcept C178790620 @default.
- W2009245864 hasConcept C18293161 @default.
- W2009245864 hasConcept C185592680 @default.
- W2009245864 hasConcept C19067145 @default.
- W2009245864 hasConcept C192562407 @default.
- W2009245864 hasConcept C41999313 @default.
- W2009245864 hasConcept C43617362 @default.
- W2009245864 hasConcept C544956773 @default.
- W2009245864 hasConceptScore W2009245864C113196181 @default.
- W2009245864 hasConceptScore W2009245864C120665830 @default.
- W2009245864 hasConceptScore W2009245864C121332964 @default.
- W2009245864 hasConceptScore W2009245864C171250308 @default.
- W2009245864 hasConceptScore W2009245864C177562468 @default.
- W2009245864 hasConceptScore W2009245864C178790620 @default.
- W2009245864 hasConceptScore W2009245864C18293161 @default.
- W2009245864 hasConceptScore W2009245864C185592680 @default.
- W2009245864 hasConceptScore W2009245864C19067145 @default.
- W2009245864 hasConceptScore W2009245864C192562407 @default.
- W2009245864 hasConceptScore W2009245864C41999313 @default.
- W2009245864 hasConceptScore W2009245864C43617362 @default.
- W2009245864 hasConceptScore W2009245864C544956773 @default.
- W2009245864 hasIssue "1-2" @default.
- W2009245864 hasLocation W20092458641 @default.
- W2009245864 hasOpenAccess W2009245864 @default.
- W2009245864 hasPrimaryLocation W20092458641 @default.
- W2009245864 hasRelatedWork W1964143041 @default.
- W2009245864 hasRelatedWork W2057301101 @default.
- W2009245864 hasRelatedWork W2080956175 @default.
- W2009245864 hasRelatedWork W2117959882 @default.
- W2009245864 hasRelatedWork W2312552982 @default.
- W2009245864 hasRelatedWork W2589080933 @default.
- W2009245864 hasRelatedWork W2899084033 @default.
- W2009245864 hasRelatedWork W2989659940 @default.
- W2009245864 hasRelatedWork W3036157976 @default.
- W2009245864 hasRelatedWork W4367042001 @default.
- W2009245864 hasVolume "233" @default.
- W2009245864 isParatext "false" @default.
- W2009245864 isRetracted "false" @default.
- W2009245864 magId "2009245864" @default.
- W2009245864 workType "article" @default.