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- W2009339737 abstract "Recent improvements in calibration procedures have led to reductions in overall uncertainties of laser power and energy calibrations to ±1%. We plan to extend these services to include laser dose measurements and angular response. Deviations from cosine behavior for angular response can introduce measurement errors when dose meters, calibrated with parallel laser beams, are employed in stepper systems. These measurement errors will become important as variable numerical aperture systems become commonplace. Current and future laser measurement services at 193 and 248 nm will be reviewed." @default.
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- W2009339737 date "1998-01-01" @default.
- W2009339737 modified "2023-09-25" @default.
- W2009339737 title "Deep ultraviolet laser metrology for semiconductor photolithography" @default.
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- W2009339737 doi "https://doi.org/10.1063/1.56840" @default.
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