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- W2009348141 abstract "12 An IR sensor based on a linear array of poly Si-Ge bolometers is presented. The bolometers are surface micromachined devices employing a suspended structure to achieve thermal insulation from the substrate. Linear arrays of 64 elements have been connected to the readout chip by means of a ceramic substrate realizing a hybrid sensor. The CMOS readout chip provides a pulsed bias for the bolometers, amplification of the signal and multiplexes the output in an analog line. At room temperature an NETD of 300mK has been achieved, while the maximum readout speed is 1kHz." @default.
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- W2009348141 date "2001-02-09" @default.
- W2009348141 modified "2023-10-03" @default.
- W2009348141 title "<title>Hybrid long-wavelength IR sensor based on a linear array of poly Si-Ge uncooled microbolometers with a CMOS readout</title>" @default.
- W2009348141 doi "https://doi.org/10.1117/12.417122" @default.
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