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- W2009369588 abstract "Metalorganic chemical vapor deposition of InGaP using phosphine and tertiarybutylphosphine in various mixture ratios was carried out in order to elucidate the growth mechanism. It revealed that the two species generated from the phosphorus source, i.e., PH x ( x =0-2) radicals and phosphorus molecules (P 2 and/or P 4 ), are necessary for epitaxial growth with high source material efficiency." @default.
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- W2009369588 title "Role of Species Generated from Phosphorus Sources in InGaP Growth Mechanism" @default.
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- W2009369588 doi "https://doi.org/10.1143/jjap.32.l707" @default.
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