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- W2009373236 abstract "The characteristics of Cl2Ar chemically-assisted ion-beam etching processes for GaN and GaAs are reported. The etch rate and anisotropy have been investigated varying ion energy, tilt angle, substrate temperature, and Cl2 flow. Vertical and smooth sidewalls, which fulfill the requirements on laser facets, have been demonstrated in GaAs and GaN." @default.
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- W2009373236 date "1999-05-01" @default.
- W2009373236 modified "2023-09-25" @default.
- W2009373236 title "Comparison of the etching behavior of GaAs and GaN in a chemically-assisted ion-beam etching system" @default.
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- W2009373236 doi "https://doi.org/10.1016/s0167-9317(99)00095-7" @default.
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