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- W2009387577 abstract "In this paper, a new concept of MEMS based biosensor is presented as a promising solution for the ultra- low level and real time detection of waterborne pathogens. This novel infrared biosensor employs the SiGe/Si quantum well thermistor with a high TCR and low 1/f noise to achieve a high sensitive detection through its resistance change with the absorption of infrared radiation from the dark quencher. Meanwhile, a manufacturing process applying the adhesive wafer bonding is proposed." @default.
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- W2009387577 date "2012-06-01" @default.
- W2009387577 modified "2023-09-24" @default.
- W2009387577 title "A Novel MEMS Based Infrared Biosensor for Ultra-Sensitive Detection of Waterborne Pathogens" @default.
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- W2009387577 doi "https://doi.org/10.1109/rsete.2012.6260364" @default.
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