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- W2009392924 abstract "Using an indentation test at 900 °C, we studied the mechanical strength of epitaxial and Czochralski (CZ) silicon single crystals with germanium concentrations between 1018 and 1021 cm−3. The strength of CZ crystals is found to increase for germanium concentrations above 6×1019 cm−3 and that of epitaxial crystals independent of germanium concentrations below 3×1020 cm−3. Yamada-Kaneta, Kaneta, and Ogawa [16th International Conference on Defects in Semiconductors (Lehigh University, Bethlehem, Pennsylvania, 1991), p. 286] report that in CZ crystals alloyed with germanium in excess of 6×1019 cm−3, oxygen atoms occupy the interstitial sites next to the germanium atoms. A model compatible with the observations is that the increased strength is due to dislocation immobilization by oxygen atoms adjacent to germanium atoms." @default.
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- W2009392924 title "Mechanical strength of silicon crystals with oxygen and/or germanium impurities" @default.
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- W2009392924 doi "https://doi.org/10.1063/1.107399" @default.
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