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- W2009479457 endingPage "1253" @default.
- W2009479457 startingPage "1248" @default.
- W2009479457 abstract "A two-dimensional fluid/Monte Carlo simulation was developed to study plasma molding over deep trenches and the resulting ion and energetic (fast) neutral distributions, with emphasis on neutral beam sources. Plasma molding occurs when the sheath thickness is comparable to or smaller than the trench width. Using the electric field profiles predicted by the self-consistent fluid simulation, ions and energetic neutrals (resulting mainly by ion neutralization on the sidewall) were followed by the Monte Carlo simulation. The dominant energetic species at the bottom of a high aspect ratio trench were neutrals. A thin sheath (compared to the trench width), favored a larger energetic neutral flux at the bottom, at the expense of neutral energy and directionality. A relatively thick sheath produced neutrals of higher directionality at the expense of neutral flux. Neutral energy and directionality both increased by increasing the sheath potential." @default.
- W2009479457 created "2016-06-24" @default.
- W2009479457 creator A5002032317 @default.
- W2009479457 creator A5004545218 @default.
- W2009479457 date "2003-06-16" @default.
- W2009479457 modified "2023-09-27" @default.
- W2009479457 title "Plasma molding over deep trenches and the resulting ion and energetic neutral distributions" @default.
- W2009479457 cites W1986253113 @default.
- W2009479457 cites W1991719800 @default.
- W2009479457 cites W1998003648 @default.
- W2009479457 cites W2000422079 @default.
- W2009479457 cites W2021531827 @default.
- W2009479457 cites W2032047725 @default.
- W2009479457 cites W2032314191 @default.
- W2009479457 cites W2043335499 @default.
- W2009479457 cites W2045587130 @default.
- W2009479457 cites W2061187850 @default.
- W2009479457 cites W2066977555 @default.
- W2009479457 cites W2071484764 @default.
- W2009479457 cites W2071671291 @default.
- W2009479457 cites W2110550589 @default.
- W2009479457 cites W2165215367 @default.
- W2009479457 cites W2749486094 @default.
- W2009479457 doi "https://doi.org/10.1116/1.1574049" @default.
- W2009479457 hasPublicationYear "2003" @default.
- W2009479457 type Work @default.
- W2009479457 sameAs 2009479457 @default.
- W2009479457 citedByCount "15" @default.
- W2009479457 countsByYear W20094794572019 @default.
- W2009479457 crossrefType "journal-article" @default.
- W2009479457 hasAuthorship W2009479457A5002032317 @default.
- W2009479457 hasAuthorship W2009479457A5004545218 @default.
- W2009479457 hasConcept C105795698 @default.
- W2009479457 hasConcept C121332964 @default.
- W2009479457 hasConcept C138560296 @default.
- W2009479457 hasConcept C145148216 @default.
- W2009479457 hasConcept C155310634 @default.
- W2009479457 hasConcept C171250308 @default.
- W2009479457 hasConcept C178790620 @default.
- W2009479457 hasConcept C184779094 @default.
- W2009479457 hasConcept C185544564 @default.
- W2009479457 hasConcept C185592680 @default.
- W2009479457 hasConcept C191897082 @default.
- W2009479457 hasConcept C192562407 @default.
- W2009479457 hasConcept C19499675 @default.
- W2009479457 hasConcept C2779227376 @default.
- W2009479457 hasConcept C33923547 @default.
- W2009479457 hasConcept C68709404 @default.
- W2009479457 hasConcept C82706917 @default.
- W2009479457 hasConcept C99989476 @default.
- W2009479457 hasConceptScore W2009479457C105795698 @default.
- W2009479457 hasConceptScore W2009479457C121332964 @default.
- W2009479457 hasConceptScore W2009479457C138560296 @default.
- W2009479457 hasConceptScore W2009479457C145148216 @default.
- W2009479457 hasConceptScore W2009479457C155310634 @default.
- W2009479457 hasConceptScore W2009479457C171250308 @default.
- W2009479457 hasConceptScore W2009479457C178790620 @default.
- W2009479457 hasConceptScore W2009479457C184779094 @default.
- W2009479457 hasConceptScore W2009479457C185544564 @default.
- W2009479457 hasConceptScore W2009479457C185592680 @default.
- W2009479457 hasConceptScore W2009479457C191897082 @default.
- W2009479457 hasConceptScore W2009479457C192562407 @default.
- W2009479457 hasConceptScore W2009479457C19499675 @default.
- W2009479457 hasConceptScore W2009479457C2779227376 @default.
- W2009479457 hasConceptScore W2009479457C33923547 @default.
- W2009479457 hasConceptScore W2009479457C68709404 @default.
- W2009479457 hasConceptScore W2009479457C82706917 @default.
- W2009479457 hasConceptScore W2009479457C99989476 @default.
- W2009479457 hasIssue "4" @default.
- W2009479457 hasLocation W20094794571 @default.
- W2009479457 hasOpenAccess W2009479457 @default.
- W2009479457 hasPrimaryLocation W20094794571 @default.
- W2009479457 hasRelatedWork W1617534506 @default.
- W2009479457 hasRelatedWork W1981954100 @default.
- W2009479457 hasRelatedWork W2075988464 @default.
- W2009479457 hasRelatedWork W2091949762 @default.
- W2009479457 hasRelatedWork W2144642093 @default.
- W2009479457 hasRelatedWork W2559781471 @default.
- W2009479457 hasRelatedWork W3040943442 @default.
- W2009479457 hasRelatedWork W3101447640 @default.
- W2009479457 hasRelatedWork W4362663149 @default.
- W2009479457 hasRelatedWork W2083108293 @default.
- W2009479457 hasVolume "21" @default.
- W2009479457 isParatext "false" @default.
- W2009479457 isRetracted "false" @default.
- W2009479457 magId "2009479457" @default.
- W2009479457 workType "article" @default.