Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009487710> ?p ?o ?g. }
- W2009487710 endingPage "61" @default.
- W2009487710 startingPage "50" @default.
- W2009487710 abstract "The influence of experimental variables in combination with catalysis on the growth and microstructure of chemically vapour deposited κ-Al2O3 was investigated. The Al2O3 coatings were deposited in the temperature range of 800–1000°C and at pressures of 50–400 mbar. Hydrogen sulfide (H2S) was used as a doping/catalysing agent. General deposition characteristics of κ-Al2O3 as a function of temperature, pressure and H2S concentration are reported. In addition to scanning electron microscopy and X-ray diffraction, the microstructure and chemistry of the κ-Al2O3 layers were analysed using transmission electron microscopy. The growth rate of κ-Al2O3 could be strongly enhanced by applying H2S doping and reasonable deposition rates for κ-Al2O3 could be obtained at 800°C. Relatively very high growth rates could be obtained by increasing the total pressure simultaneously with H2S doping. Higher deposition pressure, however, increased the contribution of the homogenous gas phase reaction resulting in unacceptable thickness variations. In general, κ-Al2O3 deposited at different process conditions did not exhibit any pronounced microstructural or morphological differences, except at the deposition temperature of 800°C together with at higher doping levels (H2S>0.8%). Under these experimental conditions γ-Al2O3 was obtained. Enrichment of sulfur could be confirmed to occur in γ-Al2O3 while no sulfur was found in κ-Al2O3. Production-scale aspects concerning deposition of κ-Al2O3 and α-Al2O3 will be dealt with." @default.
- W2009487710 created "2016-06-24" @default.
- W2009487710 creator A5024082864 @default.
- W2009487710 creator A5078557689 @default.
- W2009487710 date "2001-06-01" @default.
- W2009487710 modified "2023-09-27" @default.
- W2009487710 title "Chemical vapour deposition of κ-Al2O3" @default.
- W2009487710 cites W1618339202 @default.
- W2009487710 cites W1646719692 @default.
- W2009487710 cites W1967074810 @default.
- W2009487710 cites W1972116289 @default.
- W2009487710 cites W1987093857 @default.
- W2009487710 cites W1987225853 @default.
- W2009487710 cites W1993084890 @default.
- W2009487710 cites W2018911790 @default.
- W2009487710 cites W2029569966 @default.
- W2009487710 cites W2030624064 @default.
- W2009487710 cites W2035349818 @default.
- W2009487710 cites W2036061829 @default.
- W2009487710 cites W2044667461 @default.
- W2009487710 cites W2046446216 @default.
- W2009487710 cites W2056675132 @default.
- W2009487710 cites W2069020039 @default.
- W2009487710 cites W2088655506 @default.
- W2009487710 cites W2091492903 @default.
- W2009487710 cites W2104006977 @default.
- W2009487710 cites W2130500270 @default.
- W2009487710 cites W2135799094 @default.
- W2009487710 cites W2142928636 @default.
- W2009487710 cites W2144813893 @default.
- W2009487710 cites W2169190654 @default.
- W2009487710 cites W2317488388 @default.
- W2009487710 cites W2325620268 @default.
- W2009487710 cites W2326814542 @default.
- W2009487710 cites W2043561478 @default.
- W2009487710 doi "https://doi.org/10.1016/s0040-6090(01)00814-8" @default.
- W2009487710 hasPublicationYear "2001" @default.
- W2009487710 type Work @default.
- W2009487710 sameAs 2009487710 @default.
- W2009487710 citedByCount "57" @default.
- W2009487710 countsByYear W20094877102012 @default.
- W2009487710 countsByYear W20094877102013 @default.
- W2009487710 countsByYear W20094877102014 @default.
- W2009487710 countsByYear W20094877102016 @default.
- W2009487710 countsByYear W20094877102017 @default.
- W2009487710 countsByYear W20094877102018 @default.
- W2009487710 countsByYear W20094877102019 @default.
- W2009487710 countsByYear W20094877102020 @default.
- W2009487710 countsByYear W20094877102021 @default.
- W2009487710 countsByYear W20094877102022 @default.
- W2009487710 crossrefType "journal-article" @default.
- W2009487710 hasAuthorship W2009487710A5024082864 @default.
- W2009487710 hasAuthorship W2009487710A5078557689 @default.
- W2009487710 hasConcept C113196181 @default.
- W2009487710 hasConcept C127313418 @default.
- W2009487710 hasConcept C127413603 @default.
- W2009487710 hasConcept C146088050 @default.
- W2009487710 hasConcept C151730666 @default.
- W2009487710 hasConcept C159985019 @default.
- W2009487710 hasConcept C171250308 @default.
- W2009487710 hasConcept C178790620 @default.
- W2009487710 hasConcept C185592680 @default.
- W2009487710 hasConcept C191897082 @default.
- W2009487710 hasConcept C192562407 @default.
- W2009487710 hasConcept C199289684 @default.
- W2009487710 hasConcept C26771246 @default.
- W2009487710 hasConcept C2780564542 @default.
- W2009487710 hasConcept C2816523 @default.
- W2009487710 hasConcept C42360764 @default.
- W2009487710 hasConcept C49040817 @default.
- W2009487710 hasConcept C518881349 @default.
- W2009487710 hasConcept C57410435 @default.
- W2009487710 hasConcept C57863236 @default.
- W2009487710 hasConcept C64297162 @default.
- W2009487710 hasConcept C87976508 @default.
- W2009487710 hasConceptScore W2009487710C113196181 @default.
- W2009487710 hasConceptScore W2009487710C127313418 @default.
- W2009487710 hasConceptScore W2009487710C127413603 @default.
- W2009487710 hasConceptScore W2009487710C146088050 @default.
- W2009487710 hasConceptScore W2009487710C151730666 @default.
- W2009487710 hasConceptScore W2009487710C159985019 @default.
- W2009487710 hasConceptScore W2009487710C171250308 @default.
- W2009487710 hasConceptScore W2009487710C178790620 @default.
- W2009487710 hasConceptScore W2009487710C185592680 @default.
- W2009487710 hasConceptScore W2009487710C191897082 @default.
- W2009487710 hasConceptScore W2009487710C192562407 @default.
- W2009487710 hasConceptScore W2009487710C199289684 @default.
- W2009487710 hasConceptScore W2009487710C26771246 @default.
- W2009487710 hasConceptScore W2009487710C2780564542 @default.
- W2009487710 hasConceptScore W2009487710C2816523 @default.
- W2009487710 hasConceptScore W2009487710C42360764 @default.
- W2009487710 hasConceptScore W2009487710C49040817 @default.
- W2009487710 hasConceptScore W2009487710C518881349 @default.
- W2009487710 hasConceptScore W2009487710C57410435 @default.
- W2009487710 hasConceptScore W2009487710C57863236 @default.
- W2009487710 hasConceptScore W2009487710C64297162 @default.
- W2009487710 hasConceptScore W2009487710C87976508 @default.
- W2009487710 hasIssue "1-2" @default.