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- W2009511161 abstract "We report on experimental realization of the Fang Ag superlens structure [1] suitable for further processing andintegration in bio-chips by replacing PMMA with a highly chemical resistant cyclo-olefin copolymer, mr-I T85 (MicroResist Technology, Berlin, Germany). The superlens was able to resolve 80 nm half-pitch gratings when operating at afree space wavelength of 365 nm.Fang et al. used PMMA since it enables the presence of surface plasmons at the PMMA/Ag interface at 365 nm andbecause it planarizes the quartz/chrome mask. If the superlens is to be integrated into a device where further processingis needed involving various organic polar solvents, PMMA cannot be used. We propose to use mr-I T85, which is highlychemically resistant to acids and polar solvents.Our superlens stack consists of a quartz/chrome grating mask, a 40 nm layer of mr-I T85, 35 nm Ag, and finally 70 nmof the negative photoresist mr-UVL 6000 (Micro Resist). A 50 nm layer of aluminium on top of the quartz/chrome maskreflected all light that did not penetrate through the mask openings thereby reducing waveguiding in the top resist layer.The exposures took place in a UV-aligner at 365 nm corresponding to the excitation wavelength of the surface plasmonsat the mr-I T85/Ag interface. Supporting COMSOL simulations illustrate the field intensity distribution inside the resistas well as the presence of surface plasmons at the mr-I T85/Ag boundary. AFM scans of the exposed structure revealed80 nm gratings." @default.
- W2009511161 created "2016-06-24" @default.
- W2009511161 creator A5025081592 @default.
- W2009511161 creator A5051067293 @default.
- W2009511161 creator A5054073086 @default.
- W2009511161 creator A5066890134 @default.
- W2009511161 creator A5074752967 @default.
- W2009511161 creator A5084682275 @default.
- W2009511161 date "2009-08-20" @default.
- W2009511161 modified "2023-09-28" @default.
- W2009511161 title "Experimental investigation of Fang's Ag superlens suitable for integration" @default.
- W2009511161 doi "https://doi.org/10.1117/12.825940" @default.
- W2009511161 hasPublicationYear "2009" @default.
- W2009511161 type Work @default.
- W2009511161 sameAs 2009511161 @default.
- W2009511161 citedByCount "0" @default.
- W2009511161 crossrefType "proceedings-article" @default.
- W2009511161 hasAuthorship W2009511161A5025081592 @default.
- W2009511161 hasAuthorship W2009511161A5051067293 @default.
- W2009511161 hasAuthorship W2009511161A5054073086 @default.
- W2009511161 hasAuthorship W2009511161A5066890134 @default.
- W2009511161 hasAuthorship W2009511161A5074752967 @default.
- W2009511161 hasAuthorship W2009511161A5084682275 @default.
- W2009511161 hasConcept C110879396 @default.
- W2009511161 hasConcept C120665830 @default.
- W2009511161 hasConcept C121332964 @default.
- W2009511161 hasConcept C134406635 @default.
- W2009511161 hasConcept C136676167 @default.
- W2009511161 hasConcept C171250308 @default.
- W2009511161 hasConcept C192562407 @default.
- W2009511161 hasConcept C2779227376 @default.
- W2009511161 hasConcept C42067758 @default.
- W2009511161 hasConcept C49040817 @default.
- W2009511161 hasConcept C53524968 @default.
- W2009511161 hasConcept C6260449 @default.
- W2009511161 hasConcept C94631461 @default.
- W2009511161 hasConceptScore W2009511161C110879396 @default.
- W2009511161 hasConceptScore W2009511161C120665830 @default.
- W2009511161 hasConceptScore W2009511161C121332964 @default.
- W2009511161 hasConceptScore W2009511161C134406635 @default.
- W2009511161 hasConceptScore W2009511161C136676167 @default.
- W2009511161 hasConceptScore W2009511161C171250308 @default.
- W2009511161 hasConceptScore W2009511161C192562407 @default.
- W2009511161 hasConceptScore W2009511161C2779227376 @default.
- W2009511161 hasConceptScore W2009511161C42067758 @default.
- W2009511161 hasConceptScore W2009511161C49040817 @default.
- W2009511161 hasConceptScore W2009511161C53524968 @default.
- W2009511161 hasConceptScore W2009511161C6260449 @default.
- W2009511161 hasConceptScore W2009511161C94631461 @default.
- W2009511161 hasLocation W20095111611 @default.
- W2009511161 hasOpenAccess W2009511161 @default.
- W2009511161 hasPrimaryLocation W20095111611 @default.
- W2009511161 hasRelatedWork W1555625673 @default.
- W2009511161 hasRelatedWork W1607368358 @default.
- W2009511161 hasRelatedWork W1974061491 @default.
- W2009511161 hasRelatedWork W1974130310 @default.
- W2009511161 hasRelatedWork W1984303026 @default.
- W2009511161 hasRelatedWork W1984660297 @default.
- W2009511161 hasRelatedWork W2004522278 @default.
- W2009511161 hasRelatedWork W2007362863 @default.
- W2009511161 hasRelatedWork W2049945422 @default.
- W2009511161 hasRelatedWork W2076463451 @default.
- W2009511161 hasRelatedWork W2082143542 @default.
- W2009511161 hasRelatedWork W2086629440 @default.
- W2009511161 hasRelatedWork W2086775575 @default.
- W2009511161 hasRelatedWork W2087648315 @default.
- W2009511161 hasRelatedWork W2088313415 @default.
- W2009511161 hasRelatedWork W2091898550 @default.
- W2009511161 hasRelatedWork W2095979238 @default.
- W2009511161 hasRelatedWork W2106620319 @default.
- W2009511161 hasRelatedWork W2113056073 @default.
- W2009511161 hasRelatedWork W2159193543 @default.
- W2009511161 isParatext "false" @default.
- W2009511161 isRetracted "false" @default.
- W2009511161 magId "2009511161" @default.
- W2009511161 workType "article" @default.