Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009554673> ?p ?o ?g. }
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- W2009554673 endingPage "1012" @default.
- W2009554673 startingPage "1009" @default.
- W2009554673 abstract "The paper describes results obtained using a self-compensated rf Langmuir probe to determine fundamental plasma parameters. The quantities investigated are the floating and plasma potentials, the electron and positive ion number densities and the electron temperature as a function of the discharge power (at 13.56 MHz) which varied from 10 to 150 W for oxygen and from 10 to 70 W for chlorine when the pressure of the two gases was kept at 30 mtorr. The results demonstrate the values of the Langmuir probe as a diagnostic tool for processing plasmas." @default.
- W2009554673 created "2016-06-24" @default.
- W2009554673 creator A5003359894 @default.
- W2009554673 creator A5008917408 @default.
- W2009554673 creator A5067669976 @default.
- W2009554673 creator A5084203406 @default.
- W2009554673 date "1991-01-01" @default.
- W2009554673 modified "2023-09-24" @default.
- W2009554673 title "Langmuir probe studies of oxygen and chlorine discharges in a 13.56 MHz plasma reactor" @default.
- W2009554673 cites W1990047287 @default.
- W2009554673 cites W2022350187 @default.
- W2009554673 cites W2058740513 @default.
- W2009554673 cites W2083992789 @default.
- W2009554673 cites W3023391520 @default.
- W2009554673 doi "https://doi.org/10.1016/0042-207x(91)90009-8" @default.
- W2009554673 hasPublicationYear "1991" @default.
- W2009554673 type Work @default.
- W2009554673 sameAs 2009554673 @default.
- W2009554673 citedByCount "19" @default.
- W2009554673 crossrefType "journal-article" @default.
- W2009554673 hasAuthorship W2009554673A5003359894 @default.
- W2009554673 hasAuthorship W2009554673A5008917408 @default.
- W2009554673 hasAuthorship W2009554673A5067669976 @default.
- W2009554673 hasAuthorship W2009554673A5084203406 @default.
- W2009554673 hasConcept C107872376 @default.
- W2009554673 hasConcept C113196181 @default.
- W2009554673 hasConcept C115958267 @default.
- W2009554673 hasConcept C121332964 @default.
- W2009554673 hasConcept C145148216 @default.
- W2009554673 hasConcept C147120987 @default.
- W2009554673 hasConcept C147789679 @default.
- W2009554673 hasConcept C150394285 @default.
- W2009554673 hasConcept C176118016 @default.
- W2009554673 hasConcept C178790620 @default.
- W2009554673 hasConcept C184779094 @default.
- W2009554673 hasConcept C185592680 @default.
- W2009554673 hasConcept C192039680 @default.
- W2009554673 hasConcept C22175881 @default.
- W2009554673 hasConcept C30646810 @default.
- W2009554673 hasConcept C43503373 @default.
- W2009554673 hasConcept C505241676 @default.
- W2009554673 hasConcept C540031477 @default.
- W2009554673 hasConcept C62520636 @default.
- W2009554673 hasConcept C82706917 @default.
- W2009554673 hasConcept C97355855 @default.
- W2009554673 hasConceptScore W2009554673C107872376 @default.
- W2009554673 hasConceptScore W2009554673C113196181 @default.
- W2009554673 hasConceptScore W2009554673C115958267 @default.
- W2009554673 hasConceptScore W2009554673C121332964 @default.
- W2009554673 hasConceptScore W2009554673C145148216 @default.
- W2009554673 hasConceptScore W2009554673C147120987 @default.
- W2009554673 hasConceptScore W2009554673C147789679 @default.
- W2009554673 hasConceptScore W2009554673C150394285 @default.
- W2009554673 hasConceptScore W2009554673C176118016 @default.
- W2009554673 hasConceptScore W2009554673C178790620 @default.
- W2009554673 hasConceptScore W2009554673C184779094 @default.
- W2009554673 hasConceptScore W2009554673C185592680 @default.
- W2009554673 hasConceptScore W2009554673C192039680 @default.
- W2009554673 hasConceptScore W2009554673C22175881 @default.
- W2009554673 hasConceptScore W2009554673C30646810 @default.
- W2009554673 hasConceptScore W2009554673C43503373 @default.
- W2009554673 hasConceptScore W2009554673C505241676 @default.
- W2009554673 hasConceptScore W2009554673C540031477 @default.
- W2009554673 hasConceptScore W2009554673C62520636 @default.
- W2009554673 hasConceptScore W2009554673C82706917 @default.
- W2009554673 hasConceptScore W2009554673C97355855 @default.
- W2009554673 hasIssue "15" @default.
- W2009554673 hasLocation W20095546731 @default.
- W2009554673 hasOpenAccess W2009554673 @default.
- W2009554673 hasPrimaryLocation W20095546731 @default.
- W2009554673 hasRelatedWork W1963911796 @default.
- W2009554673 hasRelatedWork W2009554673 @default.
- W2009554673 hasRelatedWork W2021415606 @default.
- W2009554673 hasRelatedWork W2064509173 @default.
- W2009554673 hasRelatedWork W2078148991 @default.
- W2009554673 hasRelatedWork W2093865842 @default.
- W2009554673 hasRelatedWork W2141940423 @default.
- W2009554673 hasRelatedWork W3173169590 @default.
- W2009554673 hasRelatedWork W4240235848 @default.
- W2009554673 hasRelatedWork W4367186977 @default.
- W2009554673 hasVolume "42" @default.
- W2009554673 isParatext "false" @default.
- W2009554673 isRetracted "false" @default.
- W2009554673 magId "2009554673" @default.
- W2009554673 workType "article" @default.