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- W2009563410 abstract "Adaptive mirrors are used in modern adaptive optics systems for direct correction of aberration in a wave front. Silicon nitride membranes are widely used in the fabrication of MEMS deformable mirror In this paper, we have studied the design and simulation aspects of MEMS based electrostatically actuated continuous membrane adaptive mirror. We have studied the effect of several factors e.g. thickness and size of mirror membrane, size of bottom electrodes & voltage applied between top & bottom electrodes on response of the mirror." @default.
- W2009563410 created "2016-06-24" @default.
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- W2009563410 date "2012-10-15" @default.
- W2009563410 modified "2023-10-05" @default.
- W2009563410 title "Design aspects of electrostatically driven MEMS adaptive mirror" @default.
- W2009563410 doi "https://doi.org/10.1117/12.925110" @default.
- W2009563410 hasPublicationYear "2012" @default.
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