Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009568310> ?p ?o ?g. }
- W2009568310 endingPage "214" @default.
- W2009568310 startingPage "210" @default.
- W2009568310 abstract "Si(100) samples of n-type have been implanted with 5.6 MeV 28Si3+ ions at elevated temperatures up to 400°C using doses of 107 to 109 cm−2. Deep level transient spectroscopy was utilized for sample analysis, and after implantation at 400°C, three new levels occur ∼0.22, ∼0.34 and ∼0.47 eV below the conduction band edge (Ec). Evidence is obtained for a high-order vacancy complex causing the Ec − 0.22 and Ec − 0.47 eV levels, which emerge above 300°C through a gradual shift of the divacancy peaks at Ec − 0.23 and Ec − 0.43 eV, respectively. The Ec − 0.34 eV level is most likely due to a complex involving impurities with concentration less than 1014 cm−3 in the silicon lattice. Furthermore, the vacancy-oxygen level at Ec − 0.18 eV increases in amplitude with temperature and is the dominating peak at 400°C." @default.
- W2009568310 created "2016-06-24" @default.
- W2009568310 creator A5001246917 @default.
- W2009568310 creator A5030770813 @default.
- W2009568310 creator A5074917182 @default.
- W2009568310 date "1995-03-01" @default.
- W2009568310 modified "2023-09-30" @default.
- W2009568310 title "Point defects observed in crystalline silicon implanted by MeV Si ions at elevated temperatures" @default.
- W2009568310 cites W1971424536 @default.
- W2009568310 cites W1986627835 @default.
- W2009568310 cites W2001396753 @default.
- W2009568310 cites W2014821571 @default.
- W2009568310 cites W2028256739 @default.
- W2009568310 cites W2031882613 @default.
- W2009568310 cites W2038092186 @default.
- W2009568310 cites W2044563961 @default.
- W2009568310 cites W2053398693 @default.
- W2009568310 cites W2056359734 @default.
- W2009568310 cites W2060197255 @default.
- W2009568310 cites W2061768091 @default.
- W2009568310 cites W2064073710 @default.
- W2009568310 cites W2065799713 @default.
- W2009568310 cites W2068092366 @default.
- W2009568310 cites W2074167442 @default.
- W2009568310 cites W2083156957 @default.
- W2009568310 cites W2086556500 @default.
- W2009568310 cites W2088911594 @default.
- W2009568310 cites W2094737589 @default.
- W2009568310 cites W2139836010 @default.
- W2009568310 cites W2168792671 @default.
- W2009568310 doi "https://doi.org/10.1016/0168-583x(94)00484-6" @default.
- W2009568310 hasPublicationYear "1995" @default.
- W2009568310 type Work @default.
- W2009568310 sameAs 2009568310 @default.
- W2009568310 citedByCount "21" @default.
- W2009568310 countsByYear W20095683102015 @default.
- W2009568310 countsByYear W20095683102021 @default.
- W2009568310 countsByYear W20095683102022 @default.
- W2009568310 crossrefType "journal-article" @default.
- W2009568310 hasAuthorship W2009568310A5001246917 @default.
- W2009568310 hasAuthorship W2009568310A5030770813 @default.
- W2009568310 hasAuthorship W2009568310A5074917182 @default.
- W2009568310 hasConcept C113196181 @default.
- W2009568310 hasConcept C114221277 @default.
- W2009568310 hasConcept C121332964 @default.
- W2009568310 hasConcept C145148216 @default.
- W2009568310 hasConcept C147120987 @default.
- W2009568310 hasConcept C164675345 @default.
- W2009568310 hasConcept C178790620 @default.
- W2009568310 hasConcept C184779094 @default.
- W2009568310 hasConcept C185592680 @default.
- W2009568310 hasConcept C191897082 @default.
- W2009568310 hasConcept C192562407 @default.
- W2009568310 hasConcept C27067764 @default.
- W2009568310 hasConcept C2780080961 @default.
- W2009568310 hasConcept C41823505 @default.
- W2009568310 hasConcept C43617362 @default.
- W2009568310 hasConcept C540031477 @default.
- W2009568310 hasConcept C544956773 @default.
- W2009568310 hasConcept C62520636 @default.
- W2009568310 hasConcept C71987851 @default.
- W2009568310 hasConcept C8010536 @default.
- W2009568310 hasConceptScore W2009568310C113196181 @default.
- W2009568310 hasConceptScore W2009568310C114221277 @default.
- W2009568310 hasConceptScore W2009568310C121332964 @default.
- W2009568310 hasConceptScore W2009568310C145148216 @default.
- W2009568310 hasConceptScore W2009568310C147120987 @default.
- W2009568310 hasConceptScore W2009568310C164675345 @default.
- W2009568310 hasConceptScore W2009568310C178790620 @default.
- W2009568310 hasConceptScore W2009568310C184779094 @default.
- W2009568310 hasConceptScore W2009568310C185592680 @default.
- W2009568310 hasConceptScore W2009568310C191897082 @default.
- W2009568310 hasConceptScore W2009568310C192562407 @default.
- W2009568310 hasConceptScore W2009568310C27067764 @default.
- W2009568310 hasConceptScore W2009568310C2780080961 @default.
- W2009568310 hasConceptScore W2009568310C41823505 @default.
- W2009568310 hasConceptScore W2009568310C43617362 @default.
- W2009568310 hasConceptScore W2009568310C540031477 @default.
- W2009568310 hasConceptScore W2009568310C544956773 @default.
- W2009568310 hasConceptScore W2009568310C62520636 @default.
- W2009568310 hasConceptScore W2009568310C71987851 @default.
- W2009568310 hasConceptScore W2009568310C8010536 @default.
- W2009568310 hasIssue "1-2" @default.
- W2009568310 hasLocation W20095683101 @default.
- W2009568310 hasOpenAccess W2009568310 @default.
- W2009568310 hasPrimaryLocation W20095683101 @default.
- W2009568310 hasRelatedWork W1661303554 @default.
- W2009568310 hasRelatedWork W1976994971 @default.
- W2009568310 hasRelatedWork W1996998216 @default.
- W2009568310 hasRelatedWork W2040530268 @default.
- W2009568310 hasRelatedWork W2047837041 @default.
- W2009568310 hasRelatedWork W2059023897 @default.
- W2009568310 hasRelatedWork W2078804965 @default.
- W2009568310 hasRelatedWork W2087168628 @default.
- W2009568310 hasRelatedWork W2167600288 @default.
- W2009568310 hasRelatedWork W2215640043 @default.
- W2009568310 hasVolume "96" @default.
- W2009568310 isParatext "false" @default.