Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009598096> ?p ?o ?g. }
- W2009598096 endingPage "337" @default.
- W2009598096 startingPage "332" @default.
- W2009598096 abstract "Abstract The growth of Pt nanocrystals (NCs) on Al2O3 surface via atomic layer deposition (ALD) was investigated deeply. A charge trapping memory using Pt NC as charge trapping layer and amorphous ALD Al2O3/HfO2 as the tunneling/blocking layers was fabricated. Pure metallic Pt NC can be formed at the initial growth stage, following the nucleation incubation model. Electrical measurements of p-SiAl2O3Pt NCsHfO2 show a larger memory window of 6.6 V at the sweeping gate voltage of ±12 V and ∼73% retention property after 105 s. Fowler–Nordheim tunneling serves as the dominant tunneling mechanism at the applied gate voltage of 10 V. Compared to that of 4.0 V with HfO2 blocking layer, control sample with Al2O3 blocking layer shows negligible memory window of 0.3 V at ±10 V, which is attributed to the smaller electric field intensity in the Al2O3 tunneling layer of stacking structures of p-SiAl2O3Pt NCsAl2O3. ALD Pt NCs with a high density of 1.0 × 1012/cm2 provides a potential approach to fabricate large area nanocrystals for future ultrahigh density nonvolatile memory applications." @default.
- W2009598096 created "2016-06-24" @default.
- W2009598096 creator A5007548382 @default.
- W2009598096 creator A5011648245 @default.
- W2009598096 creator A5013660755 @default.
- W2009598096 creator A5018827905 @default.
- W2009598096 creator A5021941803 @default.
- W2009598096 creator A5043409425 @default.
- W2009598096 creator A5060797489 @default.
- W2009598096 creator A5082834465 @default.
- W2009598096 date "2014-01-01" @default.
- W2009598096 modified "2023-10-17" @default.
- W2009598096 title "Nonvolatile memory capacitors based on Al2O3 tunneling and HfO2 blocking layers with charge storage in atomic-layer-deposited Pt nanocrystals" @default.
- W2009598096 cites W1602078015 @default.
- W2009598096 cites W1905577215 @default.
- W2009598096 cites W1965757010 @default.
- W2009598096 cites W1975451557 @default.
- W2009598096 cites W1981130398 @default.
- W2009598096 cites W1984962131 @default.
- W2009598096 cites W1995908862 @default.
- W2009598096 cites W1997022200 @default.
- W2009598096 cites W2000337081 @default.
- W2009598096 cites W2002143605 @default.
- W2009598096 cites W2004634067 @default.
- W2009598096 cites W2004878979 @default.
- W2009598096 cites W2004967694 @default.
- W2009598096 cites W2005210326 @default.
- W2009598096 cites W2005793921 @default.
- W2009598096 cites W2021122851 @default.
- W2009598096 cites W2025172217 @default.
- W2009598096 cites W2027419934 @default.
- W2009598096 cites W2032681615 @default.
- W2009598096 cites W2035931858 @default.
- W2009598096 cites W2040280433 @default.
- W2009598096 cites W2065839305 @default.
- W2009598096 cites W2078067425 @default.
- W2009598096 cites W2082415642 @default.
- W2009598096 cites W2095373465 @default.
- W2009598096 cites W2100824187 @default.
- W2009598096 cites W2110690375 @default.
- W2009598096 cites W2117884672 @default.
- W2009598096 cites W2130028915 @default.
- W2009598096 cites W2134121452 @default.
- W2009598096 cites W2134541298 @default.
- W2009598096 cites W2139304324 @default.
- W2009598096 cites W2157559075 @default.
- W2009598096 cites W2158932701 @default.
- W2009598096 cites W2170323059 @default.
- W2009598096 cites W2320967269 @default.
- W2009598096 cites W2323158762 @default.
- W2009598096 doi "https://doi.org/10.1016/j.apsusc.2013.10.160" @default.
- W2009598096 hasPublicationYear "2014" @default.
- W2009598096 type Work @default.
- W2009598096 sameAs 2009598096 @default.
- W2009598096 citedByCount "18" @default.
- W2009598096 countsByYear W20095980962014 @default.
- W2009598096 countsByYear W20095980962015 @default.
- W2009598096 countsByYear W20095980962016 @default.
- W2009598096 countsByYear W20095980962017 @default.
- W2009598096 countsByYear W20095980962018 @default.
- W2009598096 countsByYear W20095980962019 @default.
- W2009598096 countsByYear W20095980962020 @default.
- W2009598096 countsByYear W20095980962021 @default.
- W2009598096 countsByYear W20095980962022 @default.
- W2009598096 crossrefType "journal-article" @default.
- W2009598096 hasAuthorship W2009598096A5007548382 @default.
- W2009598096 hasAuthorship W2009598096A5011648245 @default.
- W2009598096 hasAuthorship W2009598096A5013660755 @default.
- W2009598096 hasAuthorship W2009598096A5018827905 @default.
- W2009598096 hasAuthorship W2009598096A5021941803 @default.
- W2009598096 hasAuthorship W2009598096A5043409425 @default.
- W2009598096 hasAuthorship W2009598096A5060797489 @default.
- W2009598096 hasAuthorship W2009598096A5082834465 @default.
- W2009598096 hasConcept C119599485 @default.
- W2009598096 hasConcept C120398109 @default.
- W2009598096 hasConcept C121332964 @default.
- W2009598096 hasConcept C127413603 @default.
- W2009598096 hasConcept C144745244 @default.
- W2009598096 hasConcept C165801399 @default.
- W2009598096 hasConcept C171250308 @default.
- W2009598096 hasConcept C175854130 @default.
- W2009598096 hasConcept C177950962 @default.
- W2009598096 hasConcept C188082385 @default.
- W2009598096 hasConcept C192562407 @default.
- W2009598096 hasConcept C2779227376 @default.
- W2009598096 hasConcept C31258907 @default.
- W2009598096 hasConcept C41008148 @default.
- W2009598096 hasConcept C49040817 @default.
- W2009598096 hasConcept C52192207 @default.
- W2009598096 hasConcept C62520636 @default.
- W2009598096 hasConcept C69544855 @default.
- W2009598096 hasConceptScore W2009598096C119599485 @default.
- W2009598096 hasConceptScore W2009598096C120398109 @default.
- W2009598096 hasConceptScore W2009598096C121332964 @default.
- W2009598096 hasConceptScore W2009598096C127413603 @default.
- W2009598096 hasConceptScore W2009598096C144745244 @default.
- W2009598096 hasConceptScore W2009598096C165801399 @default.
- W2009598096 hasConceptScore W2009598096C171250308 @default.