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- W2009602803 abstract "A non uniform sound field distribution can be a problem in a megasonic cleaning system, since a higher sound intensity can cause damage, while areas exposed to a lower intensity will be insufficiently cleaned. These non uniformities can be the result of sound field reflection, leading to standing waves, and the interference related to the near field. In a single wafer tool with a transducer facing the wafer a small height difference will have a large impact on the cleaning efficiency if standing waves are present. Here we study the impact of the wafer transducer height in a cleaning system using a megasonic nozzle above a rotating wafer." @default.
- W2009602803 created "2016-06-24" @default.
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- W2009602803 date "2009-01-01" @default.
- W2009602803 modified "2023-10-02" @default.
- W2009602803 title "The Influence of Standing Waves on Cleaning with a Megasonic Nozzle" @default.
- W2009602803 doi "https://doi.org/10.4028/www.scientific.net/ssp.145-146.23" @default.
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