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- W2009653634 abstract "Composites (C/C or C/Si), have a rather poor resistance to oxidation. Coatings made out of ternary compounds (B + C + Si) of various compositions, can provide some protection. These coatings can be obtained by CVD. However, this process has to be optimized experimentally because theoretical calculations are only indicative. On another hand, there is a lack of accurate methods to determine the composition of thin (B + C + Si) layers. In this work, we have developed a method based on (p, p'γ) reactions 10B and 28Si at 3.1 MeV. It has been checked using activation via the 12C(d, n)13N reaction, that the carbon concentration obtained by difference, is accurate. The method has been applied to a CVD process based on the use of BCl3, CH3Cl3Si and H2. The composition of coatings obtained under various experimental conditions (temperature, composition of the gas phase, etc.) was determined, as well as the homogeneity of these coatings. Optimal operating conditions were thus defined." @default.
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- W2009653634 date "1993-06-01" @default.
- W2009653634 modified "2023-09-29" @default.
- W2009653634 title "Development of a nuclear analytical technique for the analysis of ternary compounds (B + C + Si) and application to the optimization of a CVD process" @default.
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- W2009653634 doi "https://doi.org/10.1016/0168-583x(93)95404-s" @default.
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