FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009659209> ?p ?o ?g. }

• W2009659209 endingPage "2071" @default.
• W2009659209 startingPage "2065" @default.
• W2009659209 abstract "Natural type-IIa diamonds were implanted with either boron alone, carbon alone, or carbon plus boron at 77, 300, or 800 K. van der Pauw resistivity and Hall effect measurements of carrier concentration and mobility were made as a function of temperature to determine the most effective implantation conditions for semiconducting device applications. No measurable dopant incorporation occurs for the 800-K implant. The highest carrier concentration and mobility are observed when the implantation is carried out at 77 K. It is further shown that a significant increase in the hole concentration occurs when carbon is implanted prior to boron. These measurements provide direct confirmation of the theoretical predictions of Prins and co-workers. It is shown, however, that the carbon co-implant results in a decreased hole mobility. A multiple-step, low-temperature boron-ion implantation procedure that used three different implantation energies to produce an approximately uniformly doped p-type layer of about 200 nm thickness (as verified by secondary-ion-mass spectrometry on a separate sample) produced the best combination of carrier concentration and mobility. The resulting doped layer was used in the fabrication of an insulated-gate field-effect transistor that demonstrated current saturation and pinch-off at room temperature." @default.
• W2009659209 created "2016-06-24" @default.
• W2009659209 creator A5021358801 @default.
• W2009659209 creator A5023980645 @default.
• W2009659209 creator A5055997052 @default.
• W2009659209 date "1993-01-15" @default.
• W2009659209 modified "2023-10-02" @default.
• W2009659209 title "Carrier activation and mobility of boron-dopant atoms in ion-implanted diamond as a function of implantation conditions" @default.
• W2009659209 cites W1968561402 @default.
• W2009659209 cites W1970805655 @default.
• W2009659209 cites W1971256686 @default.
• W2009659209 cites W1972612716 @default.
• W2009659209 cites W1977336820 @default.
• W2009659209 cites W1995892236 @default.
• W2009659209 cites W1999955790 @default.
• W2009659209 cites W2001295327 @default.
• W2009659209 cites W2004450533 @default.
• W2009659209 cites W2021795241 @default.
• W2009659209 cites W2022544994 @default.
• W2009659209 cites W2022778275 @default.
• W2009659209 cites W2028595917 @default.
• W2009659209 cites W2031284858 @default.
• W2009659209 cites W2031384709 @default.
• W2009659209 cites W2035934669 @default.
• W2009659209 cites W2047542367 @default.
• W2009659209 cites W2066531939 @default.
• W2009659209 cites W2072049715 @default.
• W2009659209 cites W2073491777 @default.
• W2009659209 cites W2080495109 @default.
• W2009659209 cites W2092517840 @default.
• W2009659209 cites W2093674032 @default.
• W2009659209 cites W2116700610 @default.
• W2009659209 cites W2135512369 @default.
• W2009659209 cites W2144046516 @default.
• W2009659209 cites W2152246000 @default.
• W2009659209 doi "https://doi.org/10.1103/physrevb.47.2065" @default.
• W2009659209 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/10006245" @default.
• W2009659209 hasPublicationYear "1993" @default.
• W2009659209 type Work @default.
• W2009659209 sameAs 2009659209 @default.
• W2009659209 citedByCount "21" @default.
• W2009659209 countsByYear W20096592092013 @default.
• W2009659209 countsByYear W20096592092015 @default.
• W2009659209 countsByYear W20096592092016 @default.
• W2009659209 countsByYear W20096592092018 @default.
• W2009659209 crossrefType "journal-article" @default.
• W2009659209 hasAuthorship W2009659209A5021358801 @default.
• W2009659209 hasAuthorship W2009659209A5023980645 @default.
• W2009659209 hasAuthorship W2009659209A5055997052 @default.
• W2009659209 hasConcept C106782819 @default.
• W2009659209 hasConcept C113196181 @default.
• W2009659209 hasConcept C119599485 @default.
• W2009659209 hasConcept C127413603 @default.
• W2009659209 hasConcept C134112204 @default.
• W2009659209 hasConcept C145148216 @default.
• W2009659209 hasConcept C178790620 @default.
• W2009659209 hasConcept C185592680 @default.
• W2009659209 hasConcept C191952053 @default.
• W2009659209 hasConcept C192562407 @default.
• W2009659209 hasConcept C2780081452 @default.
• W2009659209 hasConcept C41823505 @default.
• W2009659209 hasConcept C43617362 @default.
• W2009659209 hasConcept C49040817 @default.
• W2009659209 hasConcept C501308230 @default.
• W2009659209 hasConcept C57863236 @default.
• W2009659209 hasConcept C69990965 @default.
• W2009659209 hasConcept C77671233 @default.
• W2009659209 hasConcept C85443114 @default.
• W2009659209 hasConceptScore W2009659209C106782819 @default.
• W2009659209 hasConceptScore W2009659209C113196181 @default.
• W2009659209 hasConceptScore W2009659209C119599485 @default.
• W2009659209 hasConceptScore W2009659209C127413603 @default.
• W2009659209 hasConceptScore W2009659209C134112204 @default.
• W2009659209 hasConceptScore W2009659209C145148216 @default.
• W2009659209 hasConceptScore W2009659209C178790620 @default.
• W2009659209 hasConceptScore W2009659209C185592680 @default.
• W2009659209 hasConceptScore W2009659209C191952053 @default.
• W2009659209 hasConceptScore W2009659209C192562407 @default.
• W2009659209 hasConceptScore W2009659209C2780081452 @default.
• W2009659209 hasConceptScore W2009659209C41823505 @default.
• W2009659209 hasConceptScore W2009659209C43617362 @default.
• W2009659209 hasConceptScore W2009659209C49040817 @default.
• W2009659209 hasConceptScore W2009659209C501308230 @default.
• W2009659209 hasConceptScore W2009659209C57863236 @default.
• W2009659209 hasConceptScore W2009659209C69990965 @default.
• W2009659209 hasConceptScore W2009659209C77671233 @default.
• W2009659209 hasConceptScore W2009659209C85443114 @default.
• W2009659209 hasIssue "4" @default.
• W2009659209 hasLocation W20096592091 @default.
• W2009659209 hasLocation W20096592092 @default.
• W2009659209 hasOpenAccess W2009659209 @default.
• W2009659209 hasPrimaryLocation W20096592091 @default.
• W2009659209 hasRelatedWork W1500725270 @default.
• W2009659209 hasRelatedWork W1968467978 @default.
• W2009659209 hasRelatedWork W1983065316 @default.
• W2009659209 hasRelatedWork W1988245999 @default.
• W2009659209 hasRelatedWork W2001481803 @default.
• W2009659209 hasRelatedWork W2009659209 @default.

• next