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- W2009668363 abstract "Abstract An electrostatic analyzer (ESA) in conjunction with a multi-channel amplifier has been used as a spectrometer for backscattered H and He ions in the energy range of about 1–1000 keV/amu. Multi-layer targets of Si and C with interspered δ-layers of heavy atoms as depth markers have been prepared by molecular beam epitaxy (MBE) and other advanced techniques. In this way, the determination of stopping power and energy straggling down to energies of a few keV has been realized with a precision of a few percent, where conventional techniques of target preparation and energy analysis are no longer feasible." @default.
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- W2009668363 date "1998-03-01" @default.
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- W2009668363 title "Low energy ion backscattering spectrometry of multi-layer targets" @default.
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