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- W2009670762 abstract "The interaction between an ethanol cluster ion beam and a silicon surface was investigated. The sputtering depth of a silicon surface irradiated with an ethanol cluster ion beam increased with acceleration voltage. The number of disordered atoms on the silicon surface irradiated with an ethanol cluster ion beam initially showed a small dependence on retarding voltage and then a steep decrease with a further increase in retarding voltage." @default.
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- W2009670762 date "2010-06-01" @default.
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- W2009670762 title "Interaction between ethanol cluster ion beam and silicon surface" @default.
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- W2009670762 doi "https://doi.org/10.1016/j.vacuum.2009.12.018" @default.
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