Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009701360> ?p ?o ?g. }
- W2009701360 endingPage "181" @default.
- W2009701360 startingPage "176" @default.
- W2009701360 abstract "Titanium nitride was formed by metal plasma immersion ion implantation and deposition using a vacuum arc with a Ti cathode and a nitrogen backfill of the vacuum chamber. A circular substrate with a diameter of 6 cm was mounted at a distance of 39 cm from the cathode. For the substrate oriented perpendicular to the plasma stream, a deposition rate independent of the position and nearly independent of the pulse voltage was obtained. A variation of the orientation of the TiN crystallites with increasing pulse voltage was observed; [220] at 1 kV pulse at 9% duty cycle, and [200] for pulse voltages from 3 to 10 kV. Additionally, a tilt of the crystallites of up to 25° from the surface normal is measured towards the edge of the substrate. This is related with the changing angle of incidence of the ions. Using a substrate tilted at 45° towards the plasma flow, a different behaviour is observed. First, the deposition rate decreases by 40% and second, the fibre texture is changed to a biaxial texture near the edge, caused by the lower symmetry of the systems." @default.
- W2009701360 created "2016-06-24" @default.
- W2009701360 creator A5041285412 @default.
- W2009701360 creator A5045015959 @default.
- W2009701360 creator A5062557210 @default.
- W2009701360 creator A5063758587 @default.
- W2009701360 date "2002-07-01" @default.
- W2009701360 modified "2023-09-23" @default.
- W2009701360 title "Lateral texture evolution during formation of TiN by MePIIID" @default.
- W2009701360 cites W1985149431 @default.
- W2009701360 cites W2000791181 @default.
- W2009701360 cites W2004154794 @default.
- W2009701360 cites W2004687893 @default.
- W2009701360 cites W2006178079 @default.
- W2009701360 cites W2007338548 @default.
- W2009701360 cites W2012779175 @default.
- W2009701360 cites W2012931921 @default.
- W2009701360 cites W2019460631 @default.
- W2009701360 cites W2037821394 @default.
- W2009701360 cites W2038624360 @default.
- W2009701360 cites W2042284106 @default.
- W2009701360 cites W2043503364 @default.
- W2009701360 cites W2046911544 @default.
- W2009701360 cites W2047325980 @default.
- W2009701360 cites W2055699752 @default.
- W2009701360 cites W2059208210 @default.
- W2009701360 cites W2060378139 @default.
- W2009701360 cites W2063509151 @default.
- W2009701360 cites W2067408449 @default.
- W2009701360 cites W2077617194 @default.
- W2009701360 cites W2079882757 @default.
- W2009701360 cites W2079891847 @default.
- W2009701360 cites W2087133729 @default.
- W2009701360 cites W2131099000 @default.
- W2009701360 cites W4230053467 @default.
- W2009701360 doi "https://doi.org/10.1016/s0257-8972(02)00125-1" @default.
- W2009701360 hasPublicationYear "2002" @default.
- W2009701360 type Work @default.
- W2009701360 sameAs 2009701360 @default.
- W2009701360 citedByCount "14" @default.
- W2009701360 countsByYear W20097013602023 @default.
- W2009701360 crossrefType "journal-article" @default.
- W2009701360 hasAuthorship W2009701360A5041285412 @default.
- W2009701360 hasAuthorship W2009701360A5045015959 @default.
- W2009701360 hasAuthorship W2009701360A5062557210 @default.
- W2009701360 hasAuthorship W2009701360A5063758587 @default.
- W2009701360 hasConcept C111368507 @default.
- W2009701360 hasConcept C115961682 @default.
- W2009701360 hasConcept C119599485 @default.
- W2009701360 hasConcept C121332964 @default.
- W2009701360 hasConcept C127313418 @default.
- W2009701360 hasConcept C127413603 @default.
- W2009701360 hasConcept C137637335 @default.
- W2009701360 hasConcept C154945302 @default.
- W2009701360 hasConcept C159985019 @default.
- W2009701360 hasConcept C191897082 @default.
- W2009701360 hasConcept C192562407 @default.
- W2009701360 hasConcept C194760766 @default.
- W2009701360 hasConcept C2777289219 @default.
- W2009701360 hasConcept C2778489163 @default.
- W2009701360 hasConcept C2779227376 @default.
- W2009701360 hasConcept C2781195486 @default.
- W2009701360 hasConcept C41008148 @default.
- W2009701360 hasConcept C44441586 @default.
- W2009701360 hasConcept C49110097 @default.
- W2009701360 hasConcept C525849907 @default.
- W2009701360 hasConcept C62520636 @default.
- W2009701360 hasConcept C82706917 @default.
- W2009701360 hasConceptScore W2009701360C111368507 @default.
- W2009701360 hasConceptScore W2009701360C115961682 @default.
- W2009701360 hasConceptScore W2009701360C119599485 @default.
- W2009701360 hasConceptScore W2009701360C121332964 @default.
- W2009701360 hasConceptScore W2009701360C127313418 @default.
- W2009701360 hasConceptScore W2009701360C127413603 @default.
- W2009701360 hasConceptScore W2009701360C137637335 @default.
- W2009701360 hasConceptScore W2009701360C154945302 @default.
- W2009701360 hasConceptScore W2009701360C159985019 @default.
- W2009701360 hasConceptScore W2009701360C191897082 @default.
- W2009701360 hasConceptScore W2009701360C192562407 @default.
- W2009701360 hasConceptScore W2009701360C194760766 @default.
- W2009701360 hasConceptScore W2009701360C2777289219 @default.
- W2009701360 hasConceptScore W2009701360C2778489163 @default.
- W2009701360 hasConceptScore W2009701360C2779227376 @default.
- W2009701360 hasConceptScore W2009701360C2781195486 @default.
- W2009701360 hasConceptScore W2009701360C41008148 @default.
- W2009701360 hasConceptScore W2009701360C44441586 @default.
- W2009701360 hasConceptScore W2009701360C49110097 @default.
- W2009701360 hasConceptScore W2009701360C525849907 @default.
- W2009701360 hasConceptScore W2009701360C62520636 @default.
- W2009701360 hasConceptScore W2009701360C82706917 @default.
- W2009701360 hasIssue "1-3" @default.
- W2009701360 hasLocation W20097013601 @default.
- W2009701360 hasOpenAccess W2009701360 @default.
- W2009701360 hasPrimaryLocation W20097013601 @default.
- W2009701360 hasRelatedWork W1969125001 @default.
- W2009701360 hasRelatedWork W1976767033 @default.
- W2009701360 hasRelatedWork W2114053521 @default.
- W2009701360 hasRelatedWork W2117296057 @default.