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- W2009732443 abstract "A comparative study of structural, electrical and thermoelectric properties of nanocrystalline copper thin films deposited using anodic vacuum arc plasma deposition technique and dc-magnetron sputtering is presented. The crystallographic texture and structural evolution of these films are investigated as a function of thickness within a range of 30 to 230 nm using XRD and SEM. AVA deposited Cu films possess smaller grains with a lesser degree of crystallinity than dc-sputtered ones. Electrical resistivity, temperature coefficient of resistance and thermoelectric power of both as-deposited and annealed Cu films of AVA and dc-magnetron sputtering is measured and their dependence on the film thickness is investigated. AVA deposited Cu films having thickness less than 100 nm show much higher resistivity than dc-sputtered ones. AVA deposited Cu films possess lower temperature coefficient of resistance values than dc-sputtered ones. The observed thickness dependence of thermoelectric power is larger in AVA deposited Cu films than in dc-sputtered ones. These electrical measurements reveal that AVA deposited Cu films possess more vacancies than dc-sputtered ones." @default.
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- W2009732443 date "2011-06-01" @default.
- W2009732443 modified "2023-10-16" @default.
- W2009732443 title "A comparative study of nanocrystalline Cu film deposited using anodic vacuum arc and dc magnetron sputtering" @default.
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- W2009732443 cites W1974733267 @default.
- W2009732443 cites W1975008083 @default.
- W2009732443 cites W1975535413 @default.
- W2009732443 cites W1976594167 @default.
- W2009732443 cites W1976618074 @default.
- W2009732443 cites W1977671021 @default.
- W2009732443 cites W1981966175 @default.
- W2009732443 cites W1984370260 @default.
- W2009732443 cites W1984721218 @default.
- W2009732443 cites W1985193578 @default.
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- W2009732443 cites W1999727577 @default.
- W2009732443 cites W2004691564 @default.
- W2009732443 cites W2006911701 @default.
- W2009732443 cites W2020440747 @default.
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- W2009732443 doi "https://doi.org/10.1016/j.surfcoat.2011.03.119" @default.
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