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• W2009775013 endingPage "691" @default.
• W2009775013 startingPage "686" @default.
• W2009775013 abstract "The thermal transpiration effect shown in intermediate flow and molecular flow regions influences the sensitivity of a capacitance diaphragm gauge (CDG) with a temperature controlled sensor head. This apparent change in the sensitivity of CDG owing to the thermal transpiration effect has to be compensated for precise pressure measurements in the range of lower than 150 Pa. In this study, the method and the uncertainty of the compensation are reported. Seven types of equations for the thermal transpiration effect were compared with the calibration results of high accuracy CDGs by the static expansion system. Takaishi-Sensui equation, Miller equation, and Setina equation show good agreement with the calibration results. The calibration results of CDGs also show that increasing the temperature of the vacuum chamber from 22.5°C to 26.0°C caused decreasing the sensitivity of CDGs by the thermal transpiration effect. The magnitude of the decrease in the sensitivity was from 0.09% for 10 Pa to 0.5% for 0.1 Pa. Such apparent changes in the sensitivity owing to the thermal transpiration effect could be compensated within 0.2% by Takaishi-Sensui equation using parameters quoted from the catalog and the literature values. In addition, this deviation could be reduced to less than 0.1% by fitting Takaishi-Sensui equation using the parameter c or the sensor temperature T2." @default.
• W2009775013 created "2016-06-24" @default.
• W2009775013 creator A5041519753 @default.
• W2009775013 creator A5042985952 @default.
• W2009775013 creator A5054122668 @default.
• W2009775013 creator A5062729944 @default.
• W2009775013 creator A5089089211 @default.
• W2009775013 date "2010-01-01" @default.
• W2009775013 modified "2023-09-25" @default.
• W2009775013 title "Compensation of Thermal Transpiration Effect for Pressure Measurements by Capacitance Diaphragm Gauge" @default.
• W2009775013 cites W1964688102 @default.
• W2009775013 cites W1971808093 @default.
• W2009775013 cites W1971872124 @default.
• W2009775013 cites W1973907747 @default.
• W2009775013 cites W1981229906 @default.
• W2009775013 cites W1994823262 @default.
• W2009775013 cites W1996124628 @default.
• W2009775013 cites W1999492265 @default.
• W2009775013 cites W2011401382 @default.
• W2009775013 cites W2013240658 @default.
• W2009775013 cites W2026710115 @default.
• W2009775013 cites W2027213647 @default.
• W2009775013 cites W2047446322 @default.
• W2009775013 cites W2055115931 @default.
• W2009775013 cites W2062739806 @default.
• W2009775013 cites W2063089006 @default.
• W2009775013 cites W2063800352 @default.
• W2009775013 cites W2083410897 @default.
• W2009775013 cites W2087257192 @default.
• W2009775013 cites W2093688613 @default.
• W2009775013 cites W2103646103 @default.
• W2009775013 cites W2312269925 @default.
• W2009775013 cites W2312748055 @default.
• W2009775013 cites W3096265803 @default.
• W2009775013 doi "https://doi.org/10.3131/jvsj2.53.686" @default.
• W2009775013 hasPublicationYear "2010" @default.
• W2009775013 type Work @default.
• W2009775013 sameAs 2009775013 @default.
• W2009775013 citedByCount "3" @default.
• W2009775013 countsByYear W20097750132014 @default.
• W2009775013 countsByYear W20097750132021 @default.
• W2009775013 crossrefType "journal-article" @default.
• W2009775013 hasAuthorship W2009775013A5041519753 @default.
• W2009775013 hasAuthorship W2009775013A5042985952 @default.
• W2009775013 hasAuthorship W2009775013A5054122668 @default.
• W2009775013 hasAuthorship W2009775013A5062729944 @default.
• W2009775013 hasAuthorship W2009775013A5089089211 @default.
• W2009775013 hasBestOaLocation W20097750131 @default.
• W2009775013 hasConcept C11171543 @default.
• W2009775013 hasConcept C113196181 @default.
• W2009775013 hasConcept C121332964 @default.
• W2009775013 hasConcept C127413603 @default.
• W2009775013 hasConcept C147789679 @default.
• W2009775013 hasConcept C15744967 @default.
• W2009775013 hasConcept C157517311 @default.
• W2009775013 hasConcept C165838908 @default.
• W2009775013 hasConcept C17525397 @default.
• W2009775013 hasConcept C183688256 @default.
• W2009775013 hasConcept C185592680 @default.
• W2009775013 hasConcept C191897082 @default.
• W2009775013 hasConcept C192562407 @default.
• W2009775013 hasConcept C204530211 @default.
• W2009775013 hasConcept C21200559 @default.
• W2009775013 hasConcept C24326235 @default.
• W2009775013 hasConcept C2780023022 @default.
• W2009775013 hasConcept C30066665 @default.
• W2009775013 hasConcept C40976572 @default.
• W2009775013 hasConcept C43617362 @default.
• W2009775013 hasConcept C55493867 @default.
• W2009775013 hasConcept C57879066 @default.
• W2009775013 hasConcept C62520636 @default.
• W2009775013 hasConcept C97355855 @default.
• W2009775013 hasConceptScore W2009775013C11171543 @default.
• W2009775013 hasConceptScore W2009775013C113196181 @default.
• W2009775013 hasConceptScore W2009775013C121332964 @default.
• W2009775013 hasConceptScore W2009775013C127413603 @default.
• W2009775013 hasConceptScore W2009775013C147789679 @default.
• W2009775013 hasConceptScore W2009775013C15744967 @default.
• W2009775013 hasConceptScore W2009775013C157517311 @default.
• W2009775013 hasConceptScore W2009775013C165838908 @default.
• W2009775013 hasConceptScore W2009775013C17525397 @default.
• W2009775013 hasConceptScore W2009775013C183688256 @default.
• W2009775013 hasConceptScore W2009775013C185592680 @default.
• W2009775013 hasConceptScore W2009775013C191897082 @default.
• W2009775013 hasConceptScore W2009775013C192562407 @default.
• W2009775013 hasConceptScore W2009775013C204530211 @default.
• W2009775013 hasConceptScore W2009775013C21200559 @default.
• W2009775013 hasConceptScore W2009775013C24326235 @default.
• W2009775013 hasConceptScore W2009775013C2780023022 @default.
• W2009775013 hasConceptScore W2009775013C30066665 @default.
• W2009775013 hasConceptScore W2009775013C40976572 @default.
• W2009775013 hasConceptScore W2009775013C43617362 @default.
• W2009775013 hasConceptScore W2009775013C55493867 @default.
• W2009775013 hasConceptScore W2009775013C57879066 @default.
• W2009775013 hasConceptScore W2009775013C62520636 @default.
• W2009775013 hasConceptScore W2009775013C97355855 @default.
• W2009775013 hasIssue "11" @default.
• W2009775013 hasLocation W20097750131 @default.

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