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- W2009791871 abstract "The Langmuir probe method and IR absorption spectroscopy were used to study the mechanisms of dry etching. The condition of the electron gas was measured by the probe method. The relationship between the condition of the electron gas and the silicon etching characteristics was also determined. The ionic conditions were estimated from these results. IR spectroscopy was used to characterize the molecular species in the discharge region. A possible mechanism for the etching of silicon by a fluorocarbon gas could be deduced from the results of the IR spectroscopic measurements. Changes in the spectrum were detected which were interpreted in terms of an increase in the concentration of excited species." @default.
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- W2009791871 date "1982-06-01" @default.
- W2009791871 modified "2023-10-09" @default.
- W2009791871 title "In situ observation of plasmas for dry etching by IR spectroscopy and probe methods" @default.
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- W2009791871 doi "https://doi.org/10.1016/0040-6090(82)90201-2" @default.
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