Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009812945> ?p ?o ?g. }
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- W2009812945 endingPage "2558" @default.
- W2009812945 startingPage "2558" @default.
- W2009812945 abstract "A new fiducial grid suitable for low-energy (1–5keV) spatial-phase locked electron-beam lithography (SPLEBL) has been developed based on an aluminum layer with an organosilane grid pattern. The grids (400nm period) were made of two to three layers of 3-amino-propyl-triethoxy-silane (APTES) that was microcontact printed onto Al coated polymethyl methacrylate (PMMA). Signal-to-noise ratios (SNRs) were measured at beam energies ranging from 1to5keV at a dose of 20μC∕cm2 and compared to the SNRs of octadecanethiol (ODT) based fiducial grids on Au, Ag, and Cu. Although fiducial grids made of ODT on Au provided excellent SNR, Au is not suitable because of poor penetration and strong scattering of the primary electrons. ODT based grids on lower atomic number metal such as Ag or Cu yielded inadequate SNRs. In contrast, APTES-based grids on Al provide SNRs approaching ODT on Au with greatly reduced electron scattering. The authors successfully developed a grid removal process that allows patterns to be resolved in the underlying PMMA. These results represent a key step in the development of low-energy SPLEBL." @default.
- W2009812945 created "2016-06-24" @default.
- W2009812945 creator A5025434013 @default.
- W2009812945 creator A5029160325 @default.
- W2009812945 date "2009-01-01" @default.
- W2009812945 modified "2023-09-27" @default.
- W2009812945 title "Amino-propyl-triethoxy-silane on aluminum fiducial grids for spatial-phase-locked electron-beam lithography" @default.
- W2009812945 cites W1983373591 @default.
- W2009812945 cites W1996430878 @default.
- W2009812945 cites W1998674913 @default.
- W2009812945 cites W1999301705 @default.
- W2009812945 cites W2001798417 @default.
- W2009812945 cites W2002750461 @default.
- W2009812945 cites W2005910156 @default.
- W2009812945 cites W2008933216 @default.
- W2009812945 cites W2011517876 @default.
- W2009812945 cites W2015161980 @default.
- W2009812945 cites W2017007572 @default.
- W2009812945 cites W2021209681 @default.
- W2009812945 cites W2022013778 @default.
- W2009812945 cites W2022565436 @default.
- W2009812945 cites W2041434930 @default.
- W2009812945 cites W2042396228 @default.
- W2009812945 cites W2046398212 @default.
- W2009812945 cites W2051486525 @default.
- W2009812945 cites W2054597404 @default.
- W2009812945 cites W2055434286 @default.
- W2009812945 cites W2066142435 @default.
- W2009812945 cites W2068167980 @default.
- W2009812945 cites W2145477387 @default.
- W2009812945 cites W2146430823 @default.
- W2009812945 doi "https://doi.org/10.1116/1.3259960" @default.
- W2009812945 hasPublicationYear "2009" @default.
- W2009812945 type Work @default.
- W2009812945 sameAs 2009812945 @default.
- W2009812945 citedByCount "5" @default.
- W2009812945 countsByYear W20098129452013 @default.
- W2009812945 countsByYear W20098129452015 @default.
- W2009812945 crossrefType "journal-article" @default.
- W2009812945 hasAuthorship W2009812945A5025434013 @default.
- W2009812945 hasAuthorship W2009812945A5029160325 @default.
- W2009812945 hasConcept C120665830 @default.
- W2009812945 hasConcept C121332964 @default.
- W2009812945 hasConcept C154945302 @default.
- W2009812945 hasConcept C159985019 @default.
- W2009812945 hasConcept C171250308 @default.
- W2009812945 hasConcept C173974348 @default.
- W2009812945 hasConcept C192562407 @default.
- W2009812945 hasConcept C200274948 @default.
- W2009812945 hasConcept C204223013 @default.
- W2009812945 hasConcept C2778024649 @default.
- W2009812945 hasConcept C2779227376 @default.
- W2009812945 hasConcept C41008148 @default.
- W2009812945 hasConcept C49040817 @default.
- W2009812945 hasConcept C53524968 @default.
- W2009812945 hasConceptScore W2009812945C120665830 @default.
- W2009812945 hasConceptScore W2009812945C121332964 @default.
- W2009812945 hasConceptScore W2009812945C154945302 @default.
- W2009812945 hasConceptScore W2009812945C159985019 @default.
- W2009812945 hasConceptScore W2009812945C171250308 @default.
- W2009812945 hasConceptScore W2009812945C173974348 @default.
- W2009812945 hasConceptScore W2009812945C192562407 @default.
- W2009812945 hasConceptScore W2009812945C200274948 @default.
- W2009812945 hasConceptScore W2009812945C204223013 @default.
- W2009812945 hasConceptScore W2009812945C2778024649 @default.
- W2009812945 hasConceptScore W2009812945C2779227376 @default.
- W2009812945 hasConceptScore W2009812945C41008148 @default.
- W2009812945 hasConceptScore W2009812945C49040817 @default.
- W2009812945 hasConceptScore W2009812945C53524968 @default.
- W2009812945 hasIssue "6" @default.
- W2009812945 hasLocation W20098129451 @default.
- W2009812945 hasOpenAccess W2009812945 @default.
- W2009812945 hasPrimaryLocation W20098129451 @default.
- W2009812945 hasRelatedWork W1533779192 @default.
- W2009812945 hasRelatedWork W1967732612 @default.
- W2009812945 hasRelatedWork W1983701459 @default.
- W2009812945 hasRelatedWork W2003991711 @default.
- W2009812945 hasRelatedWork W2045370251 @default.
- W2009812945 hasRelatedWork W2082334978 @default.
- W2009812945 hasRelatedWork W2098749959 @default.
- W2009812945 hasRelatedWork W2139871202 @default.
- W2009812945 hasRelatedWork W3098945820 @default.
- W2009812945 hasRelatedWork W4249668346 @default.
- W2009812945 hasVolume "27" @default.
- W2009812945 isParatext "false" @default.
- W2009812945 isRetracted "false" @default.
- W2009812945 magId "2009812945" @default.
- W2009812945 workType "article" @default.