Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009883498> ?p ?o ?g. }
- W2009883498 endingPage "04C048" @default.
- W2009883498 startingPage "04C048" @default.
- W2009883498 abstract "In this paper, we demonstrate newly developed process technology to fabricate complementary metal–oxide–silicon field-effect transistors (CMOSFETs) having atomically flat gate insulator film/silicon interface on (100) orientated silicon surface. They include 1,200 °C ultraclean argon ambient annealing technology for surface atomically flattening and radical oxidation technology for device isolation, flatness recovery after ion implantation, and gate insulator formation. The fabricated CMOSFET with atomically flat interface exhibit very high current drivability such as 923 and 538 µA/µm for n-channel MOSFET (nMOS) and p-channel MOSFET (pMOS) at gate length of 100 nm when combined with very low resistance source and drain contacts, four orders of magnitude lower 1/ f noise characteristics when combined with damage free plasma processes, and one decade longer time dependent dielectric breakdown (TDDB) lifetime in comparison to devices with a conventional flatness. The developed technology effectively improves the performance of the silicon-based CMOS large-scale integrated circuits (LSI)." @default.
- W2009883498 created "2016-06-24" @default.
- W2009883498 creator A5002768298 @default.
- W2009883498 creator A5014262355 @default.
- W2009883498 creator A5017855642 @default.
- W2009883498 creator A5018904746 @default.
- W2009883498 creator A5031689344 @default.
- W2009883498 creator A5051565996 @default.
- W2009883498 creator A5052265310 @default.
- W2009883498 creator A5059412772 @default.
- W2009883498 creator A5062715209 @default.
- W2009883498 creator A5076720261 @default.
- W2009883498 creator A5080056149 @default.
- W2009883498 date "2009-04-20" @default.
- W2009883498 modified "2023-09-23" @default.
- W2009883498 title "Complementary Metal–Oxide–Silicon Field-Effect-Transistors Featuring Atomically Flat Gate Insulator Film/Silicon Interface" @default.
- W2009883498 cites W1979287267 @default.
- W2009883498 cites W1981721003 @default.
- W2009883498 cites W2043004543 @default.
- W2009883498 cites W2079774163 @default.
- W2009883498 cites W2091765283 @default.
- W2009883498 cites W2110033475 @default.
- W2009883498 cites W2124782339 @default.
- W2009883498 cites W2127191346 @default.
- W2009883498 cites W2135746468 @default.
- W2009883498 cites W2094420172 @default.
- W2009883498 doi "https://doi.org/10.1143/jjap.48.04c048" @default.
- W2009883498 hasPublicationYear "2009" @default.
- W2009883498 type Work @default.
- W2009883498 sameAs 2009883498 @default.
- W2009883498 citedByCount "28" @default.
- W2009883498 countsByYear W20098834982012 @default.
- W2009883498 countsByYear W20098834982013 @default.
- W2009883498 countsByYear W20098834982014 @default.
- W2009883498 countsByYear W20098834982015 @default.
- W2009883498 countsByYear W20098834982016 @default.
- W2009883498 countsByYear W20098834982017 @default.
- W2009883498 countsByYear W20098834982019 @default.
- W2009883498 countsByYear W20098834982020 @default.
- W2009883498 countsByYear W20098834982021 @default.
- W2009883498 crossrefType "journal-article" @default.
- W2009883498 hasAuthorship W2009883498A5002768298 @default.
- W2009883498 hasAuthorship W2009883498A5014262355 @default.
- W2009883498 hasAuthorship W2009883498A5017855642 @default.
- W2009883498 hasAuthorship W2009883498A5018904746 @default.
- W2009883498 hasAuthorship W2009883498A5031689344 @default.
- W2009883498 hasAuthorship W2009883498A5051565996 @default.
- W2009883498 hasAuthorship W2009883498A5052265310 @default.
- W2009883498 hasAuthorship W2009883498A5059412772 @default.
- W2009883498 hasAuthorship W2009883498A5062715209 @default.
- W2009883498 hasAuthorship W2009883498A5076720261 @default.
- W2009883498 hasAuthorship W2009883498A5080056149 @default.
- W2009883498 hasConcept C119599485 @default.
- W2009883498 hasConcept C127413603 @default.
- W2009883498 hasConcept C145148216 @default.
- W2009883498 hasConcept C145598152 @default.
- W2009883498 hasConcept C152909973 @default.
- W2009883498 hasConcept C165801399 @default.
- W2009883498 hasConcept C166972891 @default.
- W2009883498 hasConcept C172385210 @default.
- W2009883498 hasConcept C178790620 @default.
- W2009883498 hasConcept C185592680 @default.
- W2009883498 hasConcept C192562407 @default.
- W2009883498 hasConcept C197162436 @default.
- W2009883498 hasConcept C2361726 @default.
- W2009883498 hasConcept C27050352 @default.
- W2009883498 hasConcept C2778413303 @default.
- W2009883498 hasConcept C41823505 @default.
- W2009883498 hasConcept C46362747 @default.
- W2009883498 hasConcept C49040817 @default.
- W2009883498 hasConcept C51140833 @default.
- W2009883498 hasConcept C53143962 @default.
- W2009883498 hasConcept C544956773 @default.
- W2009883498 hasConceptScore W2009883498C119599485 @default.
- W2009883498 hasConceptScore W2009883498C127413603 @default.
- W2009883498 hasConceptScore W2009883498C145148216 @default.
- W2009883498 hasConceptScore W2009883498C145598152 @default.
- W2009883498 hasConceptScore W2009883498C152909973 @default.
- W2009883498 hasConceptScore W2009883498C165801399 @default.
- W2009883498 hasConceptScore W2009883498C166972891 @default.
- W2009883498 hasConceptScore W2009883498C172385210 @default.
- W2009883498 hasConceptScore W2009883498C178790620 @default.
- W2009883498 hasConceptScore W2009883498C185592680 @default.
- W2009883498 hasConceptScore W2009883498C192562407 @default.
- W2009883498 hasConceptScore W2009883498C197162436 @default.
- W2009883498 hasConceptScore W2009883498C2361726 @default.
- W2009883498 hasConceptScore W2009883498C27050352 @default.
- W2009883498 hasConceptScore W2009883498C2778413303 @default.
- W2009883498 hasConceptScore W2009883498C41823505 @default.
- W2009883498 hasConceptScore W2009883498C46362747 @default.
- W2009883498 hasConceptScore W2009883498C49040817 @default.
- W2009883498 hasConceptScore W2009883498C51140833 @default.
- W2009883498 hasConceptScore W2009883498C53143962 @default.
- W2009883498 hasConceptScore W2009883498C544956773 @default.
- W2009883498 hasIssue "4" @default.
- W2009883498 hasLocation W20098834981 @default.
- W2009883498 hasOpenAccess W2009883498 @default.
- W2009883498 hasPrimaryLocation W20098834981 @default.