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• W2009921097 abstract "ASML has built and shipped to The College of Nanoscale Science and Engineering of the University at Albany (CNSE) and IMEC two full field step-and-scan exposure tools for extreme ultraviolet lithography. These tools, known as Alpha Demo Tools (ADT), will be used for process development and to set the foundation for the commercialization of this technology. In this paper we will present results from the set-up and integration of both ADT systems, status of resist and reticles for EUV, and the plans for using these tools at the two research centers. We will also present the first resist images from one of the tools at the customer site, and demonstrate 32nm half-pitch dense lines/spaces printing as well as 32nm dense contact hole printing." @default.
• W2009921097 created "2016-06-24" @default.
• W2009921097 creator A5001428686 @default.
• W2009921097 creator A5006305073 @default.
• W2009921097 creator A5026466046 @default.
• W2009921097 creator A5027787893 @default.
• W2009921097 creator A5035047225 @default.
• W2009921097 creator A5044178619 @default.
• W2009921097 creator A5049611130 @default.
• W2009921097 creator A5054017535 @default.
• W2009921097 creator A5054701484 @default.
• W2009921097 creator A5060397272 @default.
• W2009921097 creator A5070472383 @default.
• W2009921097 creator A5079041136 @default.
• W2009921097 creator A5085271328 @default.
• W2009921097 creator A5088391680 @default.
• W2009921097 date "2007-03-16" @default.
• W2009921097 modified "2023-10-16" @default.
• W2009921097 title "EUV lithography with the Alpha Demo Tools: status and challenges" @default.
• W2009921097 doi "https://doi.org/10.1117/12.712065" @default.
• W2009921097 hasPublicationYear "2007" @default.
• W2009921097 type Work @default.
• W2009921097 sameAs 2009921097 @default.
• W2009921097 citedByCount "29" @default.
• W2009921097 countsByYear W20099210972012 @default.
• W2009921097 countsByYear W20099210972013 @default.
• W2009921097 countsByYear W20099210972014 @default.
• W2009921097 countsByYear W20099210972015 @default.
• W2009921097 countsByYear W20099210972016 @default.
• W2009921097 countsByYear W20099210972018 @default.
• W2009921097 countsByYear W20099210972021 @default.
• W2009921097 crossrefType "proceedings-article" @default.
• W2009921097 hasAuthorship W2009921097A5001428686 @default.
• W2009921097 hasAuthorship W2009921097A5006305073 @default.
• W2009921097 hasAuthorship W2009921097A5026466046 @default.
• W2009921097 hasAuthorship W2009921097A5027787893 @default.
• W2009921097 hasAuthorship W2009921097A5035047225 @default.
• W2009921097 hasAuthorship W2009921097A5044178619 @default.
• W2009921097 hasAuthorship W2009921097A5049611130 @default.
• W2009921097 hasAuthorship W2009921097A5054017535 @default.
• W2009921097 hasAuthorship W2009921097A5054701484 @default.
• W2009921097 hasAuthorship W2009921097A5060397272 @default.
• W2009921097 hasAuthorship W2009921097A5070472383 @default.
• W2009921097 hasAuthorship W2009921097A5079041136 @default.
• W2009921097 hasAuthorship W2009921097A5085271328 @default.
• W2009921097 hasAuthorship W2009921097A5088391680 @default.
• W2009921097 hasConcept C105487726 @default.
• W2009921097 hasConcept C120665830 @default.
• W2009921097 hasConcept C121332964 @default.
• W2009921097 hasConcept C136764020 @default.
• W2009921097 hasConcept C146024833 @default.
• W2009921097 hasConcept C146617872 @default.
• W2009921097 hasConcept C160671074 @default.
• W2009921097 hasConcept C162996421 @default.
• W2009921097 hasConcept C171250308 @default.
• W2009921097 hasConcept C17744445 @default.
• W2009921097 hasConcept C183003079 @default.
• W2009921097 hasConcept C192562407 @default.
• W2009921097 hasConcept C199539241 @default.
• W2009921097 hasConcept C204223013 @default.
• W2009921097 hasConcept C2779227376 @default.
• W2009921097 hasConcept C2780625559 @default.
• W2009921097 hasConcept C41008148 @default.
• W2009921097 hasConcept C520434653 @default.
• W2009921097 hasConcept C53524968 @default.
• W2009921097 hasConceptScore W2009921097C105487726 @default.
• W2009921097 hasConceptScore W2009921097C120665830 @default.
• W2009921097 hasConceptScore W2009921097C121332964 @default.
• W2009921097 hasConceptScore W2009921097C136764020 @default.
• W2009921097 hasConceptScore W2009921097C146024833 @default.
• W2009921097 hasConceptScore W2009921097C146617872 @default.
• W2009921097 hasConceptScore W2009921097C160671074 @default.
• W2009921097 hasConceptScore W2009921097C162996421 @default.
• W2009921097 hasConceptScore W2009921097C171250308 @default.
• W2009921097 hasConceptScore W2009921097C17744445 @default.
• W2009921097 hasConceptScore W2009921097C183003079 @default.
• W2009921097 hasConceptScore W2009921097C192562407 @default.
• W2009921097 hasConceptScore W2009921097C199539241 @default.
• W2009921097 hasConceptScore W2009921097C204223013 @default.
• W2009921097 hasConceptScore W2009921097C2779227376 @default.
• W2009921097 hasConceptScore W2009921097C2780625559 @default.
• W2009921097 hasConceptScore W2009921097C41008148 @default.
• W2009921097 hasConceptScore W2009921097C520434653 @default.
• W2009921097 hasConceptScore W2009921097C53524968 @default.
• W2009921097 hasLocation W20099210971 @default.
• W2009921097 hasOpenAccess W2009921097 @default.
• W2009921097 hasPrimaryLocation W20099210971 @default.
• W2009921097 hasRelatedWork W1971909352 @default.
• W2009921097 hasRelatedWork W1976702887 @default.
• W2009921097 hasRelatedWork W1986796283 @default.
• W2009921097 hasRelatedWork W1994362107 @default.
• W2009921097 hasRelatedWork W2075121801 @default.
• W2009921097 hasRelatedWork W2082947180 @default.
• W2009921097 hasRelatedWork W2560257625 @default.
• W2009921097 hasRelatedWork W2621760440 @default.
• W2009921097 hasRelatedWork W2895110770 @default.
• W2009921097 hasRelatedWork W4281566175 @default.
• W2009921097 isParatext "false" @default.
• W2009921097 isRetracted "false" @default.
• W2009921097 magId "2009921097" @default.

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