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- W2009968310 abstract "This paper describes an improved hemispherical retarding type energy analyzer for IC testing using an electron beam. A hemispherical retarding type analyzer has been proposed for IC testing but it produces a voltage measurement error of more than 10% even for an optimum slice level. The deficiencies of the analyzer and our improved arrangement are investigated by an analysis of the potential distribution using a high resistance film. A control grid and buffer grid are introduced in the new analyzer to generate a high spherical extraction field. In addition, an electron detector is arranged to give a high collection field outside the retarding grid. The improved hemispherical retarding type energy analyzer produces only a 2% voltage measurement error for a specimen voltage range of −14 to 20 V. This level of performance is ensured for a slice level margin within a 75% range of the output amplitude." @default.
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- W2009968310 date "1981-11-01" @default.
- W2009968310 modified "2023-09-27" @default.
- W2009968310 title "Hemispherical retarding type energy analyzer for IC testing by electron beam" @default.
- W2009968310 doi "https://doi.org/10.1116/1.571162" @default.
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