Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009969576> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2009969576 abstract "We have developed a series of fullerene containing materials for use as organic hard masks. Films with a thickness of up to 250 nm were deposited via spin coating. After a crosslinking bake the films exhibit good thermal stability – in the best case a mass loss of less than 3% at 400 °C is seen. Etch resistance of the different formulations are presented and hig-hresolution patterning is demonstrated. During the transfer into silicon no adverse “wiggling” is observed at high resolution. We attribute this to the low levels of aliphatic hydrogen present in the materials." @default.
- W2009969576 created "2016-06-24" @default.
- W2009969576 creator A5000646276 @default.
- W2009969576 creator A5014852415 @default.
- W2009969576 creator A5072913420 @default.
- W2009969576 creator A5076277077 @default.
- W2009969576 creator A5080487700 @default.
- W2009969576 date "2015-03-20" @default.
- W2009969576 modified "2023-09-23" @default.
- W2009969576 title "Organic hard masks utilizing fullerene derivatives" @default.
- W2009969576 cites W1975164248 @default.
- W2009969576 cites W2089977108 @default.
- W2009969576 doi "https://doi.org/10.1117/12.2085675" @default.
- W2009969576 hasPublicationYear "2015" @default.
- W2009969576 type Work @default.
- W2009969576 sameAs 2009969576 @default.
- W2009969576 citedByCount "1" @default.
- W2009969576 countsByYear W20099695762016 @default.
- W2009969576 crossrefType "proceedings-article" @default.
- W2009969576 hasAuthorship W2009969576A5000646276 @default.
- W2009969576 hasAuthorship W2009969576A5014852415 @default.
- W2009969576 hasAuthorship W2009969576A5072913420 @default.
- W2009969576 hasAuthorship W2009969576A5076277077 @default.
- W2009969576 hasAuthorship W2009969576A5080487700 @default.
- W2009969576 hasConcept C115196108 @default.
- W2009969576 hasConcept C127413603 @default.
- W2009969576 hasConcept C138268822 @default.
- W2009969576 hasConcept C154945302 @default.
- W2009969576 hasConcept C162862793 @default.
- W2009969576 hasConcept C171250308 @default.
- W2009969576 hasConcept C178790620 @default.
- W2009969576 hasConcept C185592680 @default.
- W2009969576 hasConcept C192562407 @default.
- W2009969576 hasConcept C2779227376 @default.
- W2009969576 hasConcept C2781448156 @default.
- W2009969576 hasConcept C41008148 @default.
- W2009969576 hasConcept C42360764 @default.
- W2009969576 hasConcept C49040817 @default.
- W2009969576 hasConcept C512968161 @default.
- W2009969576 hasConcept C53524968 @default.
- W2009969576 hasConcept C544956773 @default.
- W2009969576 hasConcept C59061564 @default.
- W2009969576 hasConceptScore W2009969576C115196108 @default.
- W2009969576 hasConceptScore W2009969576C127413603 @default.
- W2009969576 hasConceptScore W2009969576C138268822 @default.
- W2009969576 hasConceptScore W2009969576C154945302 @default.
- W2009969576 hasConceptScore W2009969576C162862793 @default.
- W2009969576 hasConceptScore W2009969576C171250308 @default.
- W2009969576 hasConceptScore W2009969576C178790620 @default.
- W2009969576 hasConceptScore W2009969576C185592680 @default.
- W2009969576 hasConceptScore W2009969576C192562407 @default.
- W2009969576 hasConceptScore W2009969576C2779227376 @default.
- W2009969576 hasConceptScore W2009969576C2781448156 @default.
- W2009969576 hasConceptScore W2009969576C41008148 @default.
- W2009969576 hasConceptScore W2009969576C42360764 @default.
- W2009969576 hasConceptScore W2009969576C49040817 @default.
- W2009969576 hasConceptScore W2009969576C512968161 @default.
- W2009969576 hasConceptScore W2009969576C53524968 @default.
- W2009969576 hasConceptScore W2009969576C544956773 @default.
- W2009969576 hasConceptScore W2009969576C59061564 @default.
- W2009969576 hasLocation W20099695761 @default.
- W2009969576 hasOpenAccess W2009969576 @default.
- W2009969576 hasPrimaryLocation W20099695761 @default.
- W2009969576 hasRelatedWork W2039323606 @default.
- W2009969576 hasRelatedWork W2040242463 @default.
- W2009969576 hasRelatedWork W2046409052 @default.
- W2009969576 hasRelatedWork W2048152263 @default.
- W2009969576 hasRelatedWork W2049359916 @default.
- W2009969576 hasRelatedWork W2076646198 @default.
- W2009969576 hasRelatedWork W2090581348 @default.
- W2009969576 hasRelatedWork W2103632443 @default.
- W2009969576 hasRelatedWork W2357714851 @default.
- W2009969576 hasRelatedWork W2530907986 @default.
- W2009969576 isParatext "false" @default.
- W2009969576 isRetracted "false" @default.
- W2009969576 magId "2009969576" @default.
- W2009969576 workType "article" @default.