Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010034678> ?p ?o ?g. }
Showing items 1 to 58 of
58
with 100 items per page.
- W2010034678 abstract "An ultra-high vacuum test facility to characterize optics, coatings and detectors in the EUV and soft X-ray (38 eV - 10 keV) spectral region is presented. The system consists of a 30 1 test chamber which can be coupled with two different beamlines: it accommodates two rotators in the 0 - 20 configuration for reflectivity and diffraction efficiency measurements on optics at grazing incidence up to 6 degrees. The low-energy beamline consists of a grazing incidence spherical grating monochromator optimized for the 38 - 1000 eV spectral range. The design is based on the principle to scan the external spectrum by rotating the grating and to maintain the spectral focusing on the exit slit by changing the length of the entrance arm. Two configurations are presented for the 38 - 200 eV (160 degree deviation angle) and the 180 - 1000 eV (172 degree deviation angle) region. The high-energy beamline is optimized for the 1.5 - 10 keV range: it consists of a facility mounting the soft X-ray source and a thin filter of the same material as the emitting anode. The results of the characterization in the whole spectral region are presented. Examples of measurement of the detection efficiency of EUV and soft X-ray detectors are discussed." @default.
- W2010034678 created "2016-06-24" @default.
- W2010034678 creator A5036689904 @default.
- W2010034678 creator A5053236786 @default.
- W2010034678 creator A5062547119 @default.
- W2010034678 date "1999-11-25" @default.
- W2010034678 modified "2023-09-25" @default.
- W2010034678 title "<title>Optical performance and characterization of an EUV and soft x-ray test facility</title>" @default.
- W2010034678 doi "https://doi.org/10.1117/12.371103" @default.
- W2010034678 hasPublicationYear "1999" @default.
- W2010034678 type Work @default.
- W2010034678 sameAs 2010034678 @default.
- W2010034678 citedByCount "7" @default.
- W2010034678 countsByYear W20100346782014 @default.
- W2010034678 countsByYear W20100346782019 @default.
- W2010034678 crossrefType "proceedings-article" @default.
- W2010034678 hasAuthorship W2010034678A5036689904 @default.
- W2010034678 hasAuthorship W2010034678A5053236786 @default.
- W2010034678 hasAuthorship W2010034678A5062547119 @default.
- W2010034678 hasConcept C120665830 @default.
- W2010034678 hasConcept C121332964 @default.
- W2010034678 hasConcept C136959337 @default.
- W2010034678 hasConcept C14112920 @default.
- W2010034678 hasConcept C162996421 @default.
- W2010034678 hasConcept C168834538 @default.
- W2010034678 hasConcept C207114421 @default.
- W2010034678 hasConcept C2777813233 @default.
- W2010034678 hasConcept C2779328170 @default.
- W2010034678 hasConcept C35655370 @default.
- W2010034678 hasConcept C6260449 @default.
- W2010034678 hasConceptScore W2010034678C120665830 @default.
- W2010034678 hasConceptScore W2010034678C121332964 @default.
- W2010034678 hasConceptScore W2010034678C136959337 @default.
- W2010034678 hasConceptScore W2010034678C14112920 @default.
- W2010034678 hasConceptScore W2010034678C162996421 @default.
- W2010034678 hasConceptScore W2010034678C168834538 @default.
- W2010034678 hasConceptScore W2010034678C207114421 @default.
- W2010034678 hasConceptScore W2010034678C2777813233 @default.
- W2010034678 hasConceptScore W2010034678C2779328170 @default.
- W2010034678 hasConceptScore W2010034678C35655370 @default.
- W2010034678 hasConceptScore W2010034678C6260449 @default.
- W2010034678 hasLocation W20100346781 @default.
- W2010034678 hasOpenAccess W2010034678 @default.
- W2010034678 hasPrimaryLocation W20100346781 @default.
- W2010034678 hasRelatedWork W1152800964 @default.
- W2010034678 hasRelatedWork W1974349905 @default.
- W2010034678 hasRelatedWork W1980430927 @default.
- W2010034678 hasRelatedWork W1993279243 @default.
- W2010034678 hasRelatedWork W2010034678 @default.
- W2010034678 hasRelatedWork W2025547310 @default.
- W2010034678 hasRelatedWork W2037652962 @default.
- W2010034678 hasRelatedWork W2064302378 @default.
- W2010034678 hasRelatedWork W2354847883 @default.
- W2010034678 hasRelatedWork W4283214323 @default.
- W2010034678 isParatext "false" @default.
- W2010034678 isRetracted "false" @default.
- W2010034678 magId "2010034678" @default.
- W2010034678 workType "article" @default.