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- W2010051837 abstract "Quartz crystal has been an essential material for time and frequency and radio-frequency applications during the 20 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>th</sup> century. Quartz is always an unmatched material at the beginning of the 21 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>st</sup> century, and hold 80 % of oscillators & RF market which represent today 17 billions market with a 10 % growth per year. This paper describes other more confidential applications - the vibrating inertial MEMS - where the quartz crystal plays also a major role. Clearly, quartz crystal has still a future in these high added value applications, and for a long time." @default.
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- W2010051837 date "2012-04-01" @default.
- W2010051837 modified "2023-09-23" @default.
- W2010051837 title "The fairy world of quartz vibrating MEMS" @default.
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- W2010051837 doi "https://doi.org/10.1109/eftf.2012.6502370" @default.
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