Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010054999> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2010054999 endingPage "236" @default.
- W2010054999 startingPage "229" @default.
- W2010054999 abstract "Abstract Lead zirconate titanate (PZT) thin films have been deposited, in a reactive argon/oxygen gas mixture, from a metallic target of nominal composition Pb1.1(Zr0.4 Ti0.6) by rf magnetron sputtering on Si substrates and Pt/TiN/Ti/SiO2/Si structures. During plasma deposition, in situ Optical Emission Spectroscopy (OES) measurements show clearly a correlation between the oxygen emission line evolution and the thin film composition. As a result, the cathode surface state can be controlled by OES to ensure a good compositional transferability from the target to the film and reproducibility of thin film properties for given values of deposition parameters. Using this approach, and after annealing of as-deposited thin films by Rapid Thermal Annealing (RTA), the PZT films exhibited a well-saturated hysteresis loop at an applied electric field of 300 kV/cm with Pr of 48 μC/cm2; the dielectric constant and dissipator factor at a frequency of 100 kHz were 914 and 0.04, respectively." @default.
- W2010054999 created "2016-06-24" @default.
- W2010054999 creator A5011441966 @default.
- W2010054999 creator A5038078885 @default.
- W2010054999 creator A5064173473 @default.
- W2010054999 date "1999-03-01" @default.
- W2010054999 modified "2023-09-26" @default.
- W2010054999 title "Influence of the deposition parameters controlled by OES on PZT thin film properties deposited by RF magnetron sputtering" @default.
- W2010054999 cites W1967649287 @default.
- W2010054999 cites W1974141948 @default.
- W2010054999 cites W1996556093 @default.
- W2010054999 cites W2018521530 @default.
- W2010054999 cites W2033267162 @default.
- W2010054999 cites W2036277941 @default.
- W2010054999 cites W2056989575 @default.
- W2010054999 doi "https://doi.org/10.1080/00150199908009130" @default.
- W2010054999 hasPublicationYear "1999" @default.
- W2010054999 type Work @default.
- W2010054999 sameAs 2010054999 @default.
- W2010054999 citedByCount "2" @default.
- W2010054999 crossrefType "journal-article" @default.
- W2010054999 hasAuthorship W2010054999A5011441966 @default.
- W2010054999 hasAuthorship W2010054999A5038078885 @default.
- W2010054999 hasAuthorship W2010054999A5064173473 @default.
- W2010054999 hasConcept C113196181 @default.
- W2010054999 hasConcept C121332964 @default.
- W2010054999 hasConcept C123408415 @default.
- W2010054999 hasConcept C133386390 @default.
- W2010054999 hasConcept C159985019 @default.
- W2010054999 hasConcept C171250308 @default.
- W2010054999 hasConcept C184779094 @default.
- W2010054999 hasConcept C185592680 @default.
- W2010054999 hasConcept C19067145 @default.
- W2010054999 hasConcept C191897082 @default.
- W2010054999 hasConcept C192562407 @default.
- W2010054999 hasConcept C22423302 @default.
- W2010054999 hasConcept C2777855556 @default.
- W2010054999 hasConcept C2781128178 @default.
- W2010054999 hasConcept C43617362 @default.
- W2010054999 hasConcept C49040817 @default.
- W2010054999 hasConcept C525849907 @default.
- W2010054999 hasConcept C547737533 @default.
- W2010054999 hasConcept C61427134 @default.
- W2010054999 hasConcept C79090758 @default.
- W2010054999 hasConceptScore W2010054999C113196181 @default.
- W2010054999 hasConceptScore W2010054999C121332964 @default.
- W2010054999 hasConceptScore W2010054999C123408415 @default.
- W2010054999 hasConceptScore W2010054999C133386390 @default.
- W2010054999 hasConceptScore W2010054999C159985019 @default.
- W2010054999 hasConceptScore W2010054999C171250308 @default.
- W2010054999 hasConceptScore W2010054999C184779094 @default.
- W2010054999 hasConceptScore W2010054999C185592680 @default.
- W2010054999 hasConceptScore W2010054999C19067145 @default.
- W2010054999 hasConceptScore W2010054999C191897082 @default.
- W2010054999 hasConceptScore W2010054999C192562407 @default.
- W2010054999 hasConceptScore W2010054999C22423302 @default.
- W2010054999 hasConceptScore W2010054999C2777855556 @default.
- W2010054999 hasConceptScore W2010054999C2781128178 @default.
- W2010054999 hasConceptScore W2010054999C43617362 @default.
- W2010054999 hasConceptScore W2010054999C49040817 @default.
- W2010054999 hasConceptScore W2010054999C525849907 @default.
- W2010054999 hasConceptScore W2010054999C547737533 @default.
- W2010054999 hasConceptScore W2010054999C61427134 @default.
- W2010054999 hasConceptScore W2010054999C79090758 @default.
- W2010054999 hasIssue "1" @default.
- W2010054999 hasLocation W20100549991 @default.
- W2010054999 hasOpenAccess W2010054999 @default.
- W2010054999 hasPrimaryLocation W20100549991 @default.
- W2010054999 hasRelatedWork W1585267077 @default.
- W2010054999 hasRelatedWork W1988215619 @default.
- W2010054999 hasRelatedWork W2011236040 @default.
- W2010054999 hasRelatedWork W2011890984 @default.
- W2010054999 hasRelatedWork W2012401096 @default.
- W2010054999 hasRelatedWork W2018521530 @default.
- W2010054999 hasRelatedWork W2020868446 @default.
- W2010054999 hasRelatedWork W2033087223 @default.
- W2010054999 hasRelatedWork W2043108967 @default.
- W2010054999 hasRelatedWork W2047905629 @default.
- W2010054999 hasRelatedWork W2060166860 @default.
- W2010054999 hasRelatedWork W2073362789 @default.
- W2010054999 hasRelatedWork W2076294301 @default.
- W2010054999 hasRelatedWork W2085722199 @default.
- W2010054999 hasRelatedWork W2101600919 @default.
- W2010054999 hasRelatedWork W2157213606 @default.
- W2010054999 hasRelatedWork W2375955910 @default.
- W2010054999 hasRelatedWork W2377606266 @default.
- W2010054999 hasRelatedWork W2390614863 @default.
- W2010054999 hasRelatedWork W2594046200 @default.
- W2010054999 hasVolume "225" @default.
- W2010054999 isParatext "false" @default.
- W2010054999 isRetracted "false" @default.
- W2010054999 magId "2010054999" @default.
- W2010054999 workType "article" @default.