FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010062902> ?p ?o ?g. }

• W2010062902 abstract "MAPPER Lithography is developing a maskless lithography technology based on massively-parallel electron-beam writing in combination with high speed optical data transport for switching the electron beams. With 13,000 electron beams each delivering a current of 13nA on the wafer, a throughput of 10 wph is realized for 22nm node lithography. By clustering several of these systems together high throughputs can be realized in a small footprint. This enables a highly cost-competitive alternative to double patterning and EUV. The most mature and reliable electron source currently available that combines a high brightness, a high emission current and uniform emission is the dispenser cathode. For this electron source a reduced brightness of 10⁶ A/m²SrV has been measured, with no restrictions on emission current. With this brightness however it is possible to realize a beam current of 0.3nA (@ 25nm spotsize), which is almost a factor 50 lower than the 13nA that is required for 10 wph. Three methods can be distinguished to increase the throughput: 1. Use an electron source with a 50× higher brightness 2. Increase the number of beams and lenses 50× 3. Patterned beams: Image multiple sub-beams with each projection lens MAPPER has selected option 3) 'Patterned beams' as the method to increase the beam current to 13nA. This because an electron source with a 50x higher brightness is simply not available at this time, and increasing the number of beams and lenses 50× leads to undesirable engineering issues. During the past years MAPPER has been developing the concept of 'Patterned beams'. By imaging 7×7 sub-beams per projection lens the beam current is increased to the required 13nA level. This technique will also be used to maintain throughput at 10 wph for smaller technology nodes by further increasing the number of sub-beams per projection lens. In this paper we will describe the electron optical design used to image these multiple sub-beams per lens, as well as experimental demonstration of this electron optical configuration. Also the writing strategy will be discussed, as well as the first patterning results. One of the key components for 'Patterned beams' is the beam blanker array, since each subbeam must be switched on and off individually. The design of the blanker deflectors, the circuitry, as well as experimental results of the blanker array will be shown. Finally the roadmap to further technology nodes will be discussed." @default.
• W2010062902 created "2016-06-24" @default.
• W2010062902 creator A5007615629 @default.
• W2010062902 creator A5008380442 @default.
• W2010062902 creator A5009032668 @default.
• W2010062902 creator A5057131614 @default.
• W2010062902 creator A5057679385 @default.
• W2010062902 creator A5065937846 @default.
• W2010062902 creator A5091383804 @default.
• W2010062902 date "2010-03-11" @default.
• W2010062902 modified "2023-09-27" @default.
• W2010062902 title "Throughput enhancement technique for MAPPER maskless lithography" @default.
• W2010062902 doi "https://doi.org/10.1117/12.849447" @default.
• W2010062902 hasPublicationYear "2010" @default.
• W2010062902 type Work @default.
• W2010062902 sameAs 2010062902 @default.
• W2010062902 citedByCount "12" @default.
• W2010062902 countsByYear W20100629022013 @default.
• W2010062902 countsByYear W20100629022014 @default.
• W2010062902 countsByYear W20100629022015 @default.
• W2010062902 countsByYear W20100629022017 @default.
• W2010062902 countsByYear W20100629022018 @default.
• W2010062902 countsByYear W20100629022019 @default.
• W2010062902 countsByYear W20100629022022 @default.
• W2010062902 crossrefType "proceedings-article" @default.
• W2010062902 hasAuthorship W2010062902A5007615629 @default.
• W2010062902 hasAuthorship W2010062902A5008380442 @default.
• W2010062902 hasAuthorship W2010062902A5009032668 @default.
• W2010062902 hasAuthorship W2010062902A5057131614 @default.
• W2010062902 hasAuthorship W2010062902A5057679385 @default.
• W2010062902 hasAuthorship W2010062902A5065937846 @default.
• W2010062902 hasAuthorship W2010062902A5091383804 @default.
• W2010062902 hasConcept C120665830 @default.
• W2010062902 hasConcept C121332964 @default.
• W2010062902 hasConcept C125245961 @default.
• W2010062902 hasConcept C147120987 @default.
• W2010062902 hasConcept C157764524 @default.
• W2010062902 hasConcept C162996421 @default.
• W2010062902 hasConcept C171250308 @default.
• W2010062902 hasConcept C192562407 @default.
• W2010062902 hasConcept C200274948 @default.
• W2010062902 hasConcept C204223013 @default.
• W2010062902 hasConcept C2779227376 @default.
• W2010062902 hasConcept C41008148 @default.
• W2010062902 hasConcept C49040817 @default.
• W2010062902 hasConcept C53524968 @default.
• W2010062902 hasConcept C555944384 @default.
• W2010062902 hasConcept C62520636 @default.
• W2010062902 hasConcept C76155785 @default.
• W2010062902 hasConcept C95312477 @default.
• W2010062902 hasConceptScore W2010062902C120665830 @default.
• W2010062902 hasConceptScore W2010062902C121332964 @default.
• W2010062902 hasConceptScore W2010062902C125245961 @default.
• W2010062902 hasConceptScore W2010062902C147120987 @default.
• W2010062902 hasConceptScore W2010062902C157764524 @default.
• W2010062902 hasConceptScore W2010062902C162996421 @default.
• W2010062902 hasConceptScore W2010062902C171250308 @default.
• W2010062902 hasConceptScore W2010062902C192562407 @default.
• W2010062902 hasConceptScore W2010062902C200274948 @default.
• W2010062902 hasConceptScore W2010062902C204223013 @default.
• W2010062902 hasConceptScore W2010062902C2779227376 @default.
• W2010062902 hasConceptScore W2010062902C41008148 @default.
• W2010062902 hasConceptScore W2010062902C49040817 @default.
• W2010062902 hasConceptScore W2010062902C53524968 @default.
• W2010062902 hasConceptScore W2010062902C555944384 @default.
• W2010062902 hasConceptScore W2010062902C62520636 @default.
• W2010062902 hasConceptScore W2010062902C76155785 @default.
• W2010062902 hasConceptScore W2010062902C95312477 @default.
• W2010062902 hasLocation W20100629021 @default.
• W2010062902 hasOpenAccess W2010062902 @default.
• W2010062902 hasPrimaryLocation W20100629021 @default.
• W2010062902 hasRelatedWork W1008141977 @default.
• W2010062902 hasRelatedWork W1996907800 @default.
• W2010062902 hasRelatedWork W1999302071 @default.
• W2010062902 hasRelatedWork W2010704318 @default.
• W2010062902 hasRelatedWork W2028793003 @default.
• W2010062902 hasRelatedWork W2082111913 @default.
• W2010062902 hasRelatedWork W2088280212 @default.
• W2010062902 hasRelatedWork W2543718303 @default.
• W2010062902 hasRelatedWork W3053914760 @default.
• W2010062902 hasRelatedWork W3098945820 @default.
• W2010062902 isParatext "false" @default.
• W2010062902 isRetracted "false" @default.
• W2010062902 magId "2010062902" @default.
• W2010062902 workType "article" @default.