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- W2010084429 abstract "The change in the SAW phase velocity due to the presence of a TiO<SUB>2</SUB> thin film of the propagation surface of a piezoelectric substrate has been used for the determination of the elastic constant of the layers. The relative change (Delta) v/v in the SAW phase velocity v<SUB>0</SUB> is expressed, using the perturbation theory, in function of the material density and of the elastic constants of the film. A comparison between the values of (Delta) v/v obtained with exact calculations, the approximate theory and the experimental values allowed us to evaluate the physical constants of TiO<SUB>2</SUB> films to be used as sensitive membranes in relative humidity sensors applications." @default.
- W2010084429 created "2016-06-24" @default.
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- W2010084429 date "1999-03-10" @default.
- W2010084429 modified "2023-09-23" @default.
- W2010084429 title "Acoustic characterization of TiO 2 film for humidity sensors applications" @default.
- W2010084429 doi "https://doi.org/10.1117/12.341169" @default.
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