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- W2010097642 abstract "In a piezoelectric resonator supported by a thin film with an air gap between the substrate and the resonator, it is difficult to construct a resonator because of the stress in the resonator. Stress also affects the electrical properties in this device. In this study, stress is minimized by using (1) a structure supported at one end, and (2) a surface-supported structure. Piezoelectric resonators supported by a thin film with an easily constructed structure were proposed. In device (1), the resonant frequency, the quality factor Q and the capacitance ratio γ were 300 MHz, 1200 and 54, respectively. In device (2), the resonant frequency, Q and γ were 1.77 GHz, 300 and 250, respectively. Breakage of the thin film with a small air gap and stress in the film will be discussed. Finally, the usefulness of this method will be proved." @default.
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- W2010097642 date "1990-01-01" @default.
- W2010097642 modified "2023-09-27" @default.
- W2010097642 title "New air-gap-type piezoelectric resonator supported by thin films from the surface" @default.
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- W2010097642 doi "https://doi.org/10.1002/ecjb.4420730303" @default.
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