Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010119057> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2010119057 abstract "MOCVD tools have been used for deposition of ferroelectric and dielectric thin films. In order to deposit high quality ferroelectric and dielectric thin films for FRAM, DRAM and logic device fabrication, the design of MOCVD tools, the MOCVD precursors, and the deposition process technologies have been extensively studied by researchers/engineers in several institutions. This paper reviewed the progress of MOCVD technologies for ferroelectric and dielectric thin film depositions with emphasis on the typical MOCVD technologies of PZT and BST thin films for FRAM application." @default.
- W2010119057 created "2016-06-24" @default.
- W2010119057 creator A5035713202 @default.
- W2010119057 creator A5043804373 @default.
- W2010119057 date "2001-08-01" @default.
- W2010119057 modified "2023-09-23" @default.
- W2010119057 title "The development of MOCVD techniques for ferroelectric and dielectric thin film depositions" @default.
- W2010119057 doi "https://doi.org/10.1051/jp4:20013143" @default.
- W2010119057 hasPublicationYear "2001" @default.
- W2010119057 type Work @default.
- W2010119057 sameAs 2010119057 @default.
- W2010119057 citedByCount "0" @default.
- W2010119057 crossrefType "journal-article" @default.
- W2010119057 hasAuthorship W2010119057A5035713202 @default.
- W2010119057 hasAuthorship W2010119057A5043804373 @default.
- W2010119057 hasConcept C110738630 @default.
- W2010119057 hasConcept C127313418 @default.
- W2010119057 hasConcept C127413603 @default.
- W2010119057 hasConcept C133386390 @default.
- W2010119057 hasConcept C136525101 @default.
- W2010119057 hasConcept C142724271 @default.
- W2010119057 hasConcept C151730666 @default.
- W2010119057 hasConcept C171250308 @default.
- W2010119057 hasConcept C175665537 @default.
- W2010119057 hasConcept C19067145 @default.
- W2010119057 hasConcept C192562407 @default.
- W2010119057 hasConcept C204787440 @default.
- W2010119057 hasConcept C2779227376 @default.
- W2010119057 hasConcept C2816523 @default.
- W2010119057 hasConcept C49040817 @default.
- W2010119057 hasConcept C57410435 @default.
- W2010119057 hasConcept C61696701 @default.
- W2010119057 hasConcept C64297162 @default.
- W2010119057 hasConcept C71924100 @default.
- W2010119057 hasConcept C7366592 @default.
- W2010119057 hasConcept C79090758 @default.
- W2010119057 hasConceptScore W2010119057C110738630 @default.
- W2010119057 hasConceptScore W2010119057C127313418 @default.
- W2010119057 hasConceptScore W2010119057C127413603 @default.
- W2010119057 hasConceptScore W2010119057C133386390 @default.
- W2010119057 hasConceptScore W2010119057C136525101 @default.
- W2010119057 hasConceptScore W2010119057C142724271 @default.
- W2010119057 hasConceptScore W2010119057C151730666 @default.
- W2010119057 hasConceptScore W2010119057C171250308 @default.
- W2010119057 hasConceptScore W2010119057C175665537 @default.
- W2010119057 hasConceptScore W2010119057C19067145 @default.
- W2010119057 hasConceptScore W2010119057C192562407 @default.
- W2010119057 hasConceptScore W2010119057C204787440 @default.
- W2010119057 hasConceptScore W2010119057C2779227376 @default.
- W2010119057 hasConceptScore W2010119057C2816523 @default.
- W2010119057 hasConceptScore W2010119057C49040817 @default.
- W2010119057 hasConceptScore W2010119057C57410435 @default.
- W2010119057 hasConceptScore W2010119057C61696701 @default.
- W2010119057 hasConceptScore W2010119057C64297162 @default.
- W2010119057 hasConceptScore W2010119057C71924100 @default.
- W2010119057 hasConceptScore W2010119057C7366592 @default.
- W2010119057 hasConceptScore W2010119057C79090758 @default.
- W2010119057 hasLocation W20101190571 @default.
- W2010119057 hasOpenAccess W2010119057 @default.
- W2010119057 hasPrimaryLocation W20101190571 @default.
- W2010119057 hasRelatedWork W2019677776 @default.
- W2010119057 hasRelatedWork W2056069343 @default.
- W2010119057 hasRelatedWork W2057791328 @default.
- W2010119057 hasRelatedWork W2083826213 @default.
- W2010119057 hasRelatedWork W2094278316 @default.
- W2010119057 hasRelatedWork W2106127608 @default.
- W2010119057 hasRelatedWork W2126205067 @default.
- W2010119057 hasRelatedWork W2155739149 @default.
- W2010119057 hasRelatedWork W2319976194 @default.
- W2010119057 hasRelatedWork W2358461634 @default.
- W2010119057 hasRelatedWork W2379820493 @default.
- W2010119057 hasRelatedWork W2615955623 @default.
- W2010119057 hasRelatedWork W2623854571 @default.
- W2010119057 hasRelatedWork W2672635083 @default.
- W2010119057 hasRelatedWork W2764574362 @default.
- W2010119057 hasRelatedWork W2765011009 @default.
- W2010119057 hasRelatedWork W3140577976 @default.
- W2010119057 hasRelatedWork W648034539 @default.
- W2010119057 hasRelatedWork W754891407 @default.
- W2010119057 hasRelatedWork W2764463321 @default.
- W2010119057 isParatext "false" @default.
- W2010119057 isRetracted "false" @default.
- W2010119057 magId "2010119057" @default.
- W2010119057 workType "article" @default.