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• W2010174832 endingPage "357" @default.
• W2010174832 startingPage "352" @default.
• W2010174832 abstract "Hard and smooth nanocrystalline diamond (NCD) thin films were deposited on mirror polished silicon substrates by biased enhanced growth in a microwave plasma chemical vapor deposition system. The films were characterized by Raman spectroscopy, X-ray diffraction and atomic force microscopy. Stress in the films was calculated by measuring the radius of curvature of the films on substrates and hardness was measured using a Nanoindenter. Stress in the films increases, first, with decreasing methane concentration in the gas phase while keeping biasing voltage constant, and second, with increasing biasing voltage while keeping the methane concentration constant. Observation of enormous stress (∼30 GPa) was possible in the films, which is due to strong adhesion between the films and substrates. To the best of our knowledge, this is the maximum value of stress reported so far in any kind of carbon thin films. It was hypothesized that it is mostly hydrogen content of the films in the methane series and graphitic content of the films in voltage series that are responsible in generating compressive stress in the respective films. The hardness follows almost a reverse trend than stress with the two growth parameters and can be well-defined from the relative concentration of NCD to graphitic content of the films, as estimated from Raman spectroscopy." @default.
• W2010174832 created "2016-06-24" @default.
• W2010174832 creator A5036881002 @default.
• W2010174832 creator A5043432555 @default.
• W2010174832 creator A5066055821 @default.
• W2010174832 creator A5080093020 @default.
• W2010174832 date "2001-03-01" @default.
• W2010174832 modified "2023-09-26" @default.
• W2010174832 title "High compressive stress in nanocrystalline diamond films grown by microwave plasma chemical vapor deposition" @default.
• W2010174832 cites W1969851169 @default.
• W2010174832 cites W1971260593 @default.
• W2010174832 cites W1983356920 @default.
• W2010174832 cites W1985303787 @default.
• W2010174832 cites W1986180969 @default.
• W2010174832 cites W1992633939 @default.
• W2010174832 cites W1995109857 @default.
• W2010174832 cites W2009217845 @default.
• W2010174832 cites W2012271705 @default.
• W2010174832 cites W2016925862 @default.
• W2010174832 cites W2031918282 @default.
• W2010174832 cites W2035440376 @default.
• W2010174832 cites W2053018305 @default.
• W2010174832 cites W2054744470 @default.
• W2010174832 cites W2063043391 @default.
• W2010174832 cites W2064847483 @default.
• W2010174832 cites W2073260085 @default.
• W2010174832 cites W2078780097 @default.
• W2010174832 cites W2081936709 @default.
• W2010174832 cites W2083855830 @default.
• W2010174832 cites W2087612841 @default.
• W2010174832 cites W2137250615 @default.
• W2010174832 doi "https://doi.org/10.1016/s0925-9635(00)00504-5" @default.
• W2010174832 hasPublicationYear "2001" @default.
• W2010174832 type Work @default.
• W2010174832 sameAs 2010174832 @default.
• W2010174832 citedByCount "32" @default.
• W2010174832 countsByYear W20101748322012 @default.
• W2010174832 countsByYear W20101748322013 @default.
• W2010174832 countsByYear W20101748322014 @default.
• W2010174832 countsByYear W20101748322015 @default.
• W2010174832 countsByYear W20101748322018 @default.
• W2010174832 crossrefType "journal-article" @default.
• W2010174832 hasAuthorship W2010174832A5036881002 @default.
• W2010174832 hasAuthorship W2010174832A5043432555 @default.
• W2010174832 hasAuthorship W2010174832A5066055821 @default.
• W2010174832 hasAuthorship W2010174832A5080093020 @default.
• W2010174832 hasConcept C113196181 @default.
• W2010174832 hasConcept C120665830 @default.
• W2010174832 hasConcept C121332964 @default.
• W2010174832 hasConcept C140676511 @default.
• W2010174832 hasConcept C159985019 @default.
• W2010174832 hasConcept C165801399 @default.
• W2010174832 hasConcept C171250308 @default.
• W2010174832 hasConcept C185592680 @default.
• W2010174832 hasConcept C19067145 @default.
• W2010174832 hasConcept C192562407 @default.
• W2010174832 hasConcept C20254490 @default.
• W2010174832 hasConcept C2776921476 @default.
• W2010174832 hasConcept C2780569836 @default.
• W2010174832 hasConcept C38347018 @default.
• W2010174832 hasConcept C40003534 @default.
• W2010174832 hasConcept C43617362 @default.
• W2010174832 hasConcept C49326732 @default.
• W2010174832 hasConcept C57410435 @default.
• W2010174832 hasConcept C62520636 @default.
• W2010174832 hasConcept C75937256 @default.
• W2010174832 hasConceptScore W2010174832C113196181 @default.
• W2010174832 hasConceptScore W2010174832C120665830 @default.
• W2010174832 hasConceptScore W2010174832C121332964 @default.
• W2010174832 hasConceptScore W2010174832C140676511 @default.
• W2010174832 hasConceptScore W2010174832C159985019 @default.
• W2010174832 hasConceptScore W2010174832C165801399 @default.
• W2010174832 hasConceptScore W2010174832C171250308 @default.
• W2010174832 hasConceptScore W2010174832C185592680 @default.
• W2010174832 hasConceptScore W2010174832C19067145 @default.
• W2010174832 hasConceptScore W2010174832C192562407 @default.
• W2010174832 hasConceptScore W2010174832C20254490 @default.
• W2010174832 hasConceptScore W2010174832C2776921476 @default.
• W2010174832 hasConceptScore W2010174832C2780569836 @default.
• W2010174832 hasConceptScore W2010174832C38347018 @default.
• W2010174832 hasConceptScore W2010174832C40003534 @default.
• W2010174832 hasConceptScore W2010174832C43617362 @default.
• W2010174832 hasConceptScore W2010174832C49326732 @default.
• W2010174832 hasConceptScore W2010174832C57410435 @default.
• W2010174832 hasConceptScore W2010174832C62520636 @default.
• W2010174832 hasConceptScore W2010174832C75937256 @default.
• W2010174832 hasIssue "3-7" @default.
• W2010174832 hasLocation W20101748321 @default.
• W2010174832 hasOpenAccess W2010174832 @default.
• W2010174832 hasPrimaryLocation W20101748321 @default.
• W2010174832 hasRelatedWork W1587216933 @default.
• W2010174832 hasRelatedWork W2001785616 @default.
• W2010174832 hasRelatedWork W2002217630 @default.
• W2010174832 hasRelatedWork W2008180787 @default.
• W2010174832 hasRelatedWork W2019751039 @default.
• W2010174832 hasRelatedWork W2057243639 @default.
• W2010174832 hasRelatedWork W2084985530 @default.
• W2010174832 hasRelatedWork W2366772014 @default.

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