Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010206543> ?p ?o ?g. }
- W2010206543 endingPage "176" @default.
- W2010206543 startingPage "168" @default.
- W2010206543 abstract "A two-dimensional (r, z) time-dependent fluid model was developed and used to describe a dc planar magnetron discharge with cylindrical symmetry. The transport description of the charged species uses the corresponding first three moments of the Boltzmann equation: continuity, momentum transfer and mean energy transfer (the last one only for electrons), coupled with the Poisson equation. An original method is proposed to treat the transport equations. Electron and ion momentum transport equations are reduced to the classical drift–diffusion expression for the fluxes since the presence of the magnetic field is introduced as an additional part in the electron flux, while for ions an effective electric field was considered. Thus, both continuity and mean energy transfer equations are solved in a classical manner. Numerical simulations were performed considering argon as a buffer gas, with a neutral pressure varying between 5 and 30 mTorr, for different voltages applied on the cathode. Results obtained for densities of the charged particle, fluxes and plasma potential are in good agreement with those obtained in previous studies." @default.
- W2010206543 created "2016-06-24" @default.
- W2010206543 creator A5007214764 @default.
- W2010206543 creator A5030645229 @default.
- W2010206543 creator A5067287727 @default.
- W2010206543 creator A5078019334 @default.
- W2010206543 date "2005-02-01" @default.
- W2010206543 modified "2023-10-14" @default.
- W2010206543 title "Two-dimensional fluid approach to the dc magnetron discharge" @default.
- W2010206543 cites W1970550182 @default.
- W2010206543 cites W1971201268 @default.
- W2010206543 cites W1971319331 @default.
- W2010206543 cites W1973001692 @default.
- W2010206543 cites W1978964107 @default.
- W2010206543 cites W1980899127 @default.
- W2010206543 cites W1981630726 @default.
- W2010206543 cites W1982505696 @default.
- W2010206543 cites W1982982841 @default.
- W2010206543 cites W1984051126 @default.
- W2010206543 cites W1988239781 @default.
- W2010206543 cites W1995206118 @default.
- W2010206543 cites W1995858957 @default.
- W2010206543 cites W2000036645 @default.
- W2010206543 cites W2005815510 @default.
- W2010206543 cites W2010378341 @default.
- W2010206543 cites W2011007597 @default.
- W2010206543 cites W2015804839 @default.
- W2010206543 cites W2017981825 @default.
- W2010206543 cites W2018382470 @default.
- W2010206543 cites W2018421502 @default.
- W2010206543 cites W2022787052 @default.
- W2010206543 cites W2023991719 @default.
- W2010206543 cites W2025132403 @default.
- W2010206543 cites W2026443234 @default.
- W2010206543 cites W2027661432 @default.
- W2010206543 cites W2028328303 @default.
- W2010206543 cites W2033082083 @default.
- W2010206543 cites W2034277354 @default.
- W2010206543 cites W2042414791 @default.
- W2010206543 cites W2044558156 @default.
- W2010206543 cites W2044779045 @default.
- W2010206543 cites W2046052835 @default.
- W2010206543 cites W2046105541 @default.
- W2010206543 cites W2047301234 @default.
- W2010206543 cites W2048822877 @default.
- W2010206543 cites W2051944828 @default.
- W2010206543 cites W2063998246 @default.
- W2010206543 cites W2065364708 @default.
- W2010206543 cites W2065725998 @default.
- W2010206543 cites W2066888778 @default.
- W2010206543 cites W2068504893 @default.
- W2010206543 cites W2070369737 @default.
- W2010206543 cites W2074661492 @default.
- W2010206543 cites W2078213605 @default.
- W2010206543 cites W2124908670 @default.
- W2010206543 cites W2144968482 @default.
- W2010206543 cites W2147755674 @default.
- W2010206543 cites W4292069163 @default.
- W2010206543 doi "https://doi.org/10.1088/0963-0252/14/1/018" @default.
- W2010206543 hasPublicationYear "2005" @default.
- W2010206543 type Work @default.
- W2010206543 sameAs 2010206543 @default.
- W2010206543 citedByCount "53" @default.
- W2010206543 countsByYear W20102065432012 @default.
- W2010206543 countsByYear W20102065432013 @default.
- W2010206543 countsByYear W20102065432014 @default.
- W2010206543 countsByYear W20102065432015 @default.
- W2010206543 countsByYear W20102065432016 @default.
- W2010206543 countsByYear W20102065432018 @default.
- W2010206543 countsByYear W20102065432020 @default.
- W2010206543 countsByYear W20102065432021 @default.
- W2010206543 countsByYear W20102065432022 @default.
- W2010206543 countsByYear W20102065432023 @default.
- W2010206543 crossrefType "journal-article" @default.
- W2010206543 hasAuthorship W2010206543A5007214764 @default.
- W2010206543 hasAuthorship W2010206543A5030645229 @default.
- W2010206543 hasAuthorship W2010206543A5067287727 @default.
- W2010206543 hasAuthorship W2010206543A5078019334 @default.
- W2010206543 hasBestOaLocation W20102065432 @default.
- W2010206543 hasConcept C10138342 @default.
- W2010206543 hasConcept C121332964 @default.
- W2010206543 hasConcept C145148216 @default.
- W2010206543 hasConcept C147120987 @default.
- W2010206543 hasConcept C162324750 @default.
- W2010206543 hasConcept C165995430 @default.
- W2010206543 hasConcept C184779094 @default.
- W2010206543 hasConcept C185592680 @default.
- W2010206543 hasConcept C30475298 @default.
- W2010206543 hasConcept C547737533 @default.
- W2010206543 hasConcept C60718061 @default.
- W2010206543 hasConcept C60799052 @default.
- W2010206543 hasConcept C62520636 @default.
- W2010206543 hasConcept C82706917 @default.
- W2010206543 hasConcept C96716743 @default.
- W2010206543 hasConcept C97355855 @default.
- W2010206543 hasConceptScore W2010206543C10138342 @default.
- W2010206543 hasConceptScore W2010206543C121332964 @default.
- W2010206543 hasConceptScore W2010206543C145148216 @default.