Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010229085> ?p ?o ?g. }
Showing items 1 to 56 of
56
with 100 items per page.
- W2010229085 abstract "The paper gives the overview of various concepts of optical measurements of microelements including MEMS, MOEMS and electronic packages. In particular it describes waveguide microinterferometer which enables an alternative usage of conventional interferometry (CI), grating interferometry (GI) and digital holographic interferometry for shape in-plane and out-of-plane displacement measurements of static and dynamic microobjects. Additionally interferometric thermography (IT) is presented for determination of 3D refractive index distribution in fibre optics and waveguide microelements. To prove the applicability of these experimental tools, the wide selection of measurement examples is given." @default.
- W2010229085 created "2016-06-24" @default.
- W2010229085 creator A5019836940 @default.
- W2010229085 creator A5079110571 @default.
- W2010229085 date "2002-07-29" @default.
- W2010229085 modified "2023-09-23" @default.
- W2010229085 title "<title>New challenges and approaches to interferometric MEMS and MOEMS testing</title>" @default.
- W2010229085 cites W2008847054 @default.
- W2010229085 cites W2026430828 @default.
- W2010229085 cites W2047129446 @default.
- W2010229085 doi "https://doi.org/10.1117/12.484467" @default.
- W2010229085 hasPublicationYear "2002" @default.
- W2010229085 type Work @default.
- W2010229085 sameAs 2010229085 @default.
- W2010229085 citedByCount "5" @default.
- W2010229085 countsByYear W20102290852012 @default.
- W2010229085 countsByYear W20102290852020 @default.
- W2010229085 crossrefType "proceedings-article" @default.
- W2010229085 hasAuthorship W2010229085A5019836940 @default.
- W2010229085 hasAuthorship W2010229085A5079110571 @default.
- W2010229085 hasConcept C120665830 @default.
- W2010229085 hasConcept C121332964 @default.
- W2010229085 hasConcept C127413603 @default.
- W2010229085 hasConcept C166689943 @default.
- W2010229085 hasConcept C24326235 @default.
- W2010229085 hasConcept C37977207 @default.
- W2010229085 hasConcept C41008148 @default.
- W2010229085 hasConcept C49040817 @default.
- W2010229085 hasConcept C76155785 @default.
- W2010229085 hasConceptScore W2010229085C120665830 @default.
- W2010229085 hasConceptScore W2010229085C121332964 @default.
- W2010229085 hasConceptScore W2010229085C127413603 @default.
- W2010229085 hasConceptScore W2010229085C166689943 @default.
- W2010229085 hasConceptScore W2010229085C24326235 @default.
- W2010229085 hasConceptScore W2010229085C37977207 @default.
- W2010229085 hasConceptScore W2010229085C41008148 @default.
- W2010229085 hasConceptScore W2010229085C49040817 @default.
- W2010229085 hasConceptScore W2010229085C76155785 @default.
- W2010229085 hasLocation W20102290851 @default.
- W2010229085 hasLocation W20102290852 @default.
- W2010229085 hasOpenAccess W2010229085 @default.
- W2010229085 hasPrimaryLocation W20102290851 @default.
- W2010229085 hasRelatedWork W1989837109 @default.
- W2010229085 hasRelatedWork W1997812895 @default.
- W2010229085 hasRelatedWork W2019545806 @default.
- W2010229085 hasRelatedWork W2062212401 @default.
- W2010229085 hasRelatedWork W2086543489 @default.
- W2010229085 hasRelatedWork W2110777316 @default.
- W2010229085 hasRelatedWork W2110891573 @default.
- W2010229085 hasRelatedWork W2130314459 @default.
- W2010229085 hasRelatedWork W2139251744 @default.
- W2010229085 hasRelatedWork W2899084033 @default.
- W2010229085 isParatext "false" @default.
- W2010229085 isRetracted "false" @default.
- W2010229085 magId "2010229085" @default.
- W2010229085 workType "article" @default.