Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010323610> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2010323610 endingPage "313" @default.
- W2010323610 startingPage "310" @default.
- W2010323610 abstract "In this paper we propose an all electrical resistivity profiling technique specially suitable to characterise the effects of ion implantation processes used in lifetime engineering processes. The technique is based on the operation of a simple three terminals test device, already present in most practical structures. The theory of the measurement method is presented and two-dimensional simulations showing the reliability of the method are also shown. Moreover, experimental results gained on helium implanted devices are given. In particular, measurements performed at different temperatures have permitted to identify a trap center with an energy level located at Ec-0.23 eV as the responsible for the changes in the resistivity of helium implanted devices." @default.
- W2010323610 created "2016-06-24" @default.
- W2010323610 creator A5016102824 @default.
- W2010323610 creator A5063802944 @default.
- W2010323610 creator A5066513881 @default.
- W2010323610 creator A5076035431 @default.
- W2010323610 date "2005-12-01" @default.
- W2010323610 modified "2023-09-23" @default.
- W2010323610 title "All electrical resistivity profiling technique for ion implanted semiconductor materials" @default.
- W2010323610 cites W1972858889 @default.
- W2010323610 cites W1993293449 @default.
- W2010323610 cites W2038894927 @default.
- W2010323610 doi "https://doi.org/10.1016/j.mseb.2005.08.025" @default.
- W2010323610 hasPublicationYear "2005" @default.
- W2010323610 type Work @default.
- W2010323610 sameAs 2010323610 @default.
- W2010323610 citedByCount "4" @default.
- W2010323610 crossrefType "journal-article" @default.
- W2010323610 hasAuthorship W2010323610A5016102824 @default.
- W2010323610 hasAuthorship W2010323610A5063802944 @default.
- W2010323610 hasAuthorship W2010323610A5066513881 @default.
- W2010323610 hasAuthorship W2010323610A5076035431 @default.
- W2010323610 hasConcept C108225325 @default.
- W2010323610 hasConcept C111919701 @default.
- W2010323610 hasConcept C116915560 @default.
- W2010323610 hasConcept C119599485 @default.
- W2010323610 hasConcept C121332964 @default.
- W2010323610 hasConcept C127413603 @default.
- W2010323610 hasConcept C145148216 @default.
- W2010323610 hasConcept C178790620 @default.
- W2010323610 hasConcept C184779094 @default.
- W2010323610 hasConcept C185592680 @default.
- W2010323610 hasConcept C187191949 @default.
- W2010323610 hasConcept C192562407 @default.
- W2010323610 hasConcept C41008148 @default.
- W2010323610 hasConcept C41823505 @default.
- W2010323610 hasConcept C49040817 @default.
- W2010323610 hasConcept C546029482 @default.
- W2010323610 hasConcept C61696701 @default.
- W2010323610 hasConcept C69990965 @default.
- W2010323610 hasConceptScore W2010323610C108225325 @default.
- W2010323610 hasConceptScore W2010323610C111919701 @default.
- W2010323610 hasConceptScore W2010323610C116915560 @default.
- W2010323610 hasConceptScore W2010323610C119599485 @default.
- W2010323610 hasConceptScore W2010323610C121332964 @default.
- W2010323610 hasConceptScore W2010323610C127413603 @default.
- W2010323610 hasConceptScore W2010323610C145148216 @default.
- W2010323610 hasConceptScore W2010323610C178790620 @default.
- W2010323610 hasConceptScore W2010323610C184779094 @default.
- W2010323610 hasConceptScore W2010323610C185592680 @default.
- W2010323610 hasConceptScore W2010323610C187191949 @default.
- W2010323610 hasConceptScore W2010323610C192562407 @default.
- W2010323610 hasConceptScore W2010323610C41008148 @default.
- W2010323610 hasConceptScore W2010323610C41823505 @default.
- W2010323610 hasConceptScore W2010323610C49040817 @default.
- W2010323610 hasConceptScore W2010323610C546029482 @default.
- W2010323610 hasConceptScore W2010323610C61696701 @default.
- W2010323610 hasConceptScore W2010323610C69990965 @default.
- W2010323610 hasLocation W20103236101 @default.
- W2010323610 hasOpenAccess W2010323610 @default.
- W2010323610 hasPrimaryLocation W20103236101 @default.
- W2010323610 hasRelatedWork W12808447 @default.
- W2010323610 hasRelatedWork W1486692629 @default.
- W2010323610 hasRelatedWork W1537942165 @default.
- W2010323610 hasRelatedWork W1623063880 @default.
- W2010323610 hasRelatedWork W2007882161 @default.
- W2010323610 hasRelatedWork W2093282459 @default.
- W2010323610 hasRelatedWork W216009271 @default.
- W2010323610 hasRelatedWork W246195809 @default.
- W2010323610 hasRelatedWork W2803865685 @default.
- W2010323610 hasRelatedWork W3011460842 @default.
- W2010323610 hasVolume "124-125" @default.
- W2010323610 isParatext "false" @default.
- W2010323610 isRetracted "false" @default.
- W2010323610 magId "2010323610" @default.
- W2010323610 workType "article" @default.