Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010332524> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2010332524 endingPage "517" @default.
- W2010332524 startingPage "511" @default.
- W2010332524 abstract "Smooth GaN layers were successfully grown on metallic TiN buffer layers by metalorganic chemical vapor deposition (MOCVD). One important factor in controlling GaN layer smoothness was the TiN layer thickness. We investigated systematically the effects of this thickness, and found an optimal thickness of 5 nm, at which the smallest average grain size (20 nm) and smoothest surface were obtained. The TiN layers increased surface coverage with GaN hexagons at an early stage of GaN growth, indicating that enhancing the GaN nucleation is essential for smooth GaN layer growth, and small grain size and smooth surface are needed to enhance GaN nucleation. Further reduction in TiN layer thickness to 2 nm decreased the surface coverage with GaN hexagons, and a high density of grooves and holes were observed in the surface of the 2-μm-thick GaN layers. Defect structures in the GaN layers grown on the TiN layers were remarkably changed on reduction of TiN layer thickness from 5 nm to 2 nm. GaN growth was found to be sensitive to the TiN layer thickness between 2 nm and 5 nm." @default.
- W2010332524 created "2016-06-24" @default.
- W2010332524 creator A5003930310 @default.
- W2010332524 creator A5013635330 @default.
- W2010332524 creator A5059892393 @default.
- W2010332524 creator A5073091175 @default.
- W2010332524 creator A5073858357 @default.
- W2010332524 creator A5089273020 @default.
- W2010332524 creator A5089985674 @default.
- W2010332524 date "2008-11-26" @default.
- W2010332524 modified "2023-10-15" @default.
- W2010332524 title "Effects of TiN Buffer Layer Thickness on GaN Growth" @default.
- W2010332524 cites W2007930532 @default.
- W2010332524 cites W2008736866 @default.
- W2010332524 cites W2049532801 @default.
- W2010332524 cites W2075991069 @default.
- W2010332524 cites W2021733858 @default.
- W2010332524 doi "https://doi.org/10.1007/s11664-008-0597-y" @default.
- W2010332524 hasPublicationYear "2008" @default.
- W2010332524 type Work @default.
- W2010332524 sameAs 2010332524 @default.
- W2010332524 citedByCount "3" @default.
- W2010332524 countsByYear W20103325242012 @default.
- W2010332524 countsByYear W20103325242016 @default.
- W2010332524 countsByYear W20103325242022 @default.
- W2010332524 crossrefType "journal-article" @default.
- W2010332524 hasAuthorship W2010332524A5003930310 @default.
- W2010332524 hasAuthorship W2010332524A5013635330 @default.
- W2010332524 hasAuthorship W2010332524A5059892393 @default.
- W2010332524 hasAuthorship W2010332524A5073091175 @default.
- W2010332524 hasAuthorship W2010332524A5073858357 @default.
- W2010332524 hasAuthorship W2010332524A5089273020 @default.
- W2010332524 hasAuthorship W2010332524A5089985674 @default.
- W2010332524 hasBestOaLocation W20103325242 @default.
- W2010332524 hasConcept C110738630 @default.
- W2010332524 hasConcept C159985019 @default.
- W2010332524 hasConcept C175665537 @default.
- W2010332524 hasConcept C178790620 @default.
- W2010332524 hasConcept C185592680 @default.
- W2010332524 hasConcept C191897082 @default.
- W2010332524 hasConcept C192562407 @default.
- W2010332524 hasConcept C2779227376 @default.
- W2010332524 hasConcept C49040817 @default.
- W2010332524 hasConcept C525849907 @default.
- W2010332524 hasConcept C57410435 @default.
- W2010332524 hasConcept C61048295 @default.
- W2010332524 hasConceptScore W2010332524C110738630 @default.
- W2010332524 hasConceptScore W2010332524C159985019 @default.
- W2010332524 hasConceptScore W2010332524C175665537 @default.
- W2010332524 hasConceptScore W2010332524C178790620 @default.
- W2010332524 hasConceptScore W2010332524C185592680 @default.
- W2010332524 hasConceptScore W2010332524C191897082 @default.
- W2010332524 hasConceptScore W2010332524C192562407 @default.
- W2010332524 hasConceptScore W2010332524C2779227376 @default.
- W2010332524 hasConceptScore W2010332524C49040817 @default.
- W2010332524 hasConceptScore W2010332524C525849907 @default.
- W2010332524 hasConceptScore W2010332524C57410435 @default.
- W2010332524 hasConceptScore W2010332524C61048295 @default.
- W2010332524 hasIssue "4" @default.
- W2010332524 hasLocation W20103325241 @default.
- W2010332524 hasLocation W20103325242 @default.
- W2010332524 hasOpenAccess W2010332524 @default.
- W2010332524 hasPrimaryLocation W20103325241 @default.
- W2010332524 hasRelatedWork W1482855658 @default.
- W2010332524 hasRelatedWork W2026270272 @default.
- W2010332524 hasRelatedWork W2061897979 @default.
- W2010332524 hasRelatedWork W2070074568 @default.
- W2010332524 hasRelatedWork W2248540165 @default.
- W2010332524 hasRelatedWork W2388669361 @default.
- W2010332524 hasRelatedWork W2392231899 @default.
- W2010332524 hasRelatedWork W2810895473 @default.
- W2010332524 hasRelatedWork W2902183639 @default.
- W2010332524 hasRelatedWork W3145649460 @default.
- W2010332524 hasVolume "38" @default.
- W2010332524 isParatext "false" @default.
- W2010332524 isRetracted "false" @default.
- W2010332524 magId "2010332524" @default.
- W2010332524 workType "article" @default.