FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010459549> ?p ?o ?g. }

• W2010459549 endingPage "462" @default.
• W2010459549 startingPage "459" @default.
• W2010459549 abstract "A micromachined actuator has been performed from a 50 μm thick doped silicon wafer anodically bonded onto a broached Pyrex substrate. A deep reactive ion etching allows the micromachining of a free standing diaphragm a few microns distant from four insulated electrodes. The very low electrical resistivity of the doped silicon makes possible on the one hand the application of a horizontal electrostatic force and on the other hand a capacitive detection of the displacement. The capacitances and the strength of the electrostatic force are proportional to the thickness and the size length of the suspended membrane. An electronic capacitive bridge is sensitive to the displacement of the silicon membrane of order 0.3 Å/Hz1/2 in the (x,y) plane." @default.
• W2010459549 created "2016-06-24" @default.
• W2010459549 creator A5006373659 @default.
• W2010459549 creator A5010135472 @default.
• W2010459549 creator A5057126693 @default.
• W2010459549 creator A5060331150 @default.
• W2010459549 date "1999-08-01" @default.
• W2010459549 modified "2023-10-01" @default.
• W2010459549 title "A micromachined actuator for nanopositioning in two dimensions" @default.
• W2010459549 cites W2011652261 @default.
• W2010459549 cites W2055148522 @default.
• W2010459549 cites W2066967899 @default.
• W2010459549 cites W2157321441 @default.
• W2010459549 doi "https://doi.org/10.1016/s0924-4247(99)00010-2" @default.
• W2010459549 hasPublicationYear "1999" @default.
• W2010459549 type Work @default.
• W2010459549 sameAs 2010459549 @default.
• W2010459549 citedByCount "5" @default.
• W2010459549 crossrefType "journal-article" @default.
• W2010459549 hasAuthorship W2010459549A5006373659 @default.
• W2010459549 hasAuthorship W2010459549A5010135472 @default.
• W2010459549 hasAuthorship W2010459549A5057126693 @default.
• W2010459549 hasAuthorship W2010459549A5060331150 @default.
• W2010459549 hasConcept C100460472 @default.
• W2010459549 hasConcept C107551265 @default.
• W2010459549 hasConcept C111368507 @default.
• W2010459549 hasConcept C119599485 @default.
• W2010459549 hasConcept C124634506 @default.
• W2010459549 hasConcept C127313418 @default.
• W2010459549 hasConcept C127413603 @default.
• W2010459549 hasConcept C130472188 @default.
• W2010459549 hasConcept C136525101 @default.
• W2010459549 hasConcept C142724271 @default.
• W2010459549 hasConcept C145667562 @default.
• W2010459549 hasConcept C147789679 @default.
• W2010459549 hasConcept C155840801 @default.
• W2010459549 hasConcept C157138929 @default.
• W2010459549 hasConcept C15744967 @default.
• W2010459549 hasConcept C159985019 @default.
• W2010459549 hasConcept C160671074 @default.
• W2010459549 hasConcept C164292776 @default.
• W2010459549 hasConcept C172707124 @default.
• W2010459549 hasConcept C17525397 @default.
• W2010459549 hasConcept C185592680 @default.
• W2010459549 hasConcept C192562407 @default.
• W2010459549 hasConcept C204787440 @default.
• W2010459549 hasConcept C206755178 @default.
• W2010459549 hasConcept C2777289219 @default.
• W2010459549 hasConcept C2779227376 @default.
• W2010459549 hasConcept C37977207 @default.
• W2010459549 hasConcept C41075158 @default.
• W2010459549 hasConcept C49040817 @default.
• W2010459549 hasConcept C542102704 @default.
• W2010459549 hasConcept C544956773 @default.
• W2010459549 hasConcept C71924100 @default.
• W2010459549 hasConceptScore W2010459549C100460472 @default.
• W2010459549 hasConceptScore W2010459549C107551265 @default.
• W2010459549 hasConceptScore W2010459549C111368507 @default.
• W2010459549 hasConceptScore W2010459549C119599485 @default.
• W2010459549 hasConceptScore W2010459549C124634506 @default.
• W2010459549 hasConceptScore W2010459549C127313418 @default.
• W2010459549 hasConceptScore W2010459549C127413603 @default.
• W2010459549 hasConceptScore W2010459549C130472188 @default.
• W2010459549 hasConceptScore W2010459549C136525101 @default.
• W2010459549 hasConceptScore W2010459549C142724271 @default.
• W2010459549 hasConceptScore W2010459549C145667562 @default.
• W2010459549 hasConceptScore W2010459549C147789679 @default.
• W2010459549 hasConceptScore W2010459549C155840801 @default.
• W2010459549 hasConceptScore W2010459549C157138929 @default.
• W2010459549 hasConceptScore W2010459549C15744967 @default.
• W2010459549 hasConceptScore W2010459549C159985019 @default.
• W2010459549 hasConceptScore W2010459549C160671074 @default.
• W2010459549 hasConceptScore W2010459549C164292776 @default.
• W2010459549 hasConceptScore W2010459549C172707124 @default.
• W2010459549 hasConceptScore W2010459549C17525397 @default.
• W2010459549 hasConceptScore W2010459549C185592680 @default.
• W2010459549 hasConceptScore W2010459549C192562407 @default.
• W2010459549 hasConceptScore W2010459549C204787440 @default.
• W2010459549 hasConceptScore W2010459549C206755178 @default.
• W2010459549 hasConceptScore W2010459549C2777289219 @default.
• W2010459549 hasConceptScore W2010459549C2779227376 @default.
• W2010459549 hasConceptScore W2010459549C37977207 @default.
• W2010459549 hasConceptScore W2010459549C41075158 @default.
• W2010459549 hasConceptScore W2010459549C49040817 @default.
• W2010459549 hasConceptScore W2010459549C542102704 @default.
• W2010459549 hasConceptScore W2010459549C544956773 @default.
• W2010459549 hasConceptScore W2010459549C71924100 @default.
• W2010459549 hasIssue "1-3" @default.
• W2010459549 hasLocation W20104595491 @default.
• W2010459549 hasOpenAccess W2010459549 @default.
• W2010459549 hasPrimaryLocation W20104595491 @default.
• W2010459549 hasRelatedWork W1584171941 @default.
• W2010459549 hasRelatedWork W1839133467 @default.
• W2010459549 hasRelatedWork W1988333076 @default.
• W2010459549 hasRelatedWork W2010459549 @default.
• W2010459549 hasRelatedWork W2026446194 @default.
• W2010459549 hasRelatedWork W2050746330 @default.
• W2010459549 hasRelatedWork W2071524368 @default.

• next