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• W2010465009 abstract "Abstract Gate-oxide and inter-gate-oxide defects in floating-gate transistors and flash memories, the number of which has been minimized but is still not zero, have been examined extensively. Gate-oxide defects are due to 0.1  μ m size octahedral void pits at the Si surface. They are originally grown-in defects in the Si crystal and appear as surface pits when they are truncated at the surface when wafers are sliced and polished. On the other hand, inter-gate oxide defects are due to polygonal-shaped voids at the poly-silicon grain boundary. These defects are produced as a negative crystal in the crystallization process of amorphous Si during annealing. Methods for eliminating the above defects are suggested." @default.
• W2010465009 created "2016-06-24" @default.
• W2010465009 creator A5049614823 @default.
• W2010465009 creator A5053689648 @default.
• W2010465009 creator A5057531212 @default.
• W2010465009 creator A5066325797 @default.
• W2010465009 creator A5078783117 @default.
• W2010465009 date "1998-01-01" @default.
• W2010465009 modified "2023-10-04" @default.
• W2010465009 title "Origin of thin-oxide defects affecting yield and reliability of floating-gate devices and flash memories" @default.
• W2010465009 cites W1482660024 @default.
• W2010465009 cites W1514701773 @default.
• W2010465009 cites W1527855352 @default.
• W2010465009 cites W1538553157 @default.
• W2010465009 cites W1598505251 @default.
• W2010465009 cites W1964512626 @default.
• W2010465009 cites W1979675625 @default.
• W2010465009 cites W2011264215 @default.
• W2010465009 cites W2057427988 @default.
• W2010465009 cites W2085029610 @default.
• W2010465009 cites W2094846276 @default.
• W2010465009 cites W2112570578 @default.
• W2010465009 cites W2128535098 @default.
• W2010465009 cites W2139006661 @default.
• W2010465009 cites W2172025368 @default.
• W2010465009 cites W2534970125 @default.
• W2010465009 cites W2540971413 @default.
• W2010465009 doi "https://doi.org/10.1016/s0038-1101(97)00207-4" @default.
• W2010465009 hasPublicationYear "1998" @default.
• W2010465009 type Work @default.
• W2010465009 sameAs 2010465009 @default.
• W2010465009 citedByCount "1" @default.
• W2010465009 crossrefType "journal-article" @default.
• W2010465009 hasAuthorship W2010465009A5049614823 @default.
• W2010465009 hasAuthorship W2010465009A5053689648 @default.
• W2010465009 hasAuthorship W2010465009A5057531212 @default.
• W2010465009 hasAuthorship W2010465009A5066325797 @default.
• W2010465009 hasAuthorship W2010465009A5078783117 @default.
• W2010465009 hasConcept C119599485 @default.
• W2010465009 hasConcept C124296912 @default.
• W2010465009 hasConcept C127413603 @default.
• W2010465009 hasConcept C131017901 @default.
• W2010465009 hasConcept C159985019 @default.
• W2010465009 hasConcept C160671074 @default.
• W2010465009 hasConcept C165801399 @default.
• W2010465009 hasConcept C172385210 @default.
• W2010465009 hasConcept C178790620 @default.
• W2010465009 hasConcept C185592680 @default.
• W2010465009 hasConcept C191897082 @default.
• W2010465009 hasConcept C192562407 @default.
• W2010465009 hasConcept C203036418 @default.
• W2010465009 hasConcept C2361726 @default.
• W2010465009 hasConcept C2777855556 @default.
• W2010465009 hasConcept C2779772531 @default.
• W2010465009 hasConcept C2779851234 @default.
• W2010465009 hasConcept C49040817 @default.
• W2010465009 hasConcept C56052488 @default.
• W2010465009 hasConcept C8010536 @default.
• W2010465009 hasConceptScore W2010465009C119599485 @default.
• W2010465009 hasConceptScore W2010465009C124296912 @default.
• W2010465009 hasConceptScore W2010465009C127413603 @default.
• W2010465009 hasConceptScore W2010465009C131017901 @default.
• W2010465009 hasConceptScore W2010465009C159985019 @default.
• W2010465009 hasConceptScore W2010465009C160671074 @default.
• W2010465009 hasConceptScore W2010465009C165801399 @default.
• W2010465009 hasConceptScore W2010465009C172385210 @default.
• W2010465009 hasConceptScore W2010465009C178790620 @default.
• W2010465009 hasConceptScore W2010465009C185592680 @default.
• W2010465009 hasConceptScore W2010465009C191897082 @default.
• W2010465009 hasConceptScore W2010465009C192562407 @default.
• W2010465009 hasConceptScore W2010465009C203036418 @default.
• W2010465009 hasConceptScore W2010465009C2361726 @default.
• W2010465009 hasConceptScore W2010465009C2777855556 @default.
• W2010465009 hasConceptScore W2010465009C2779772531 @default.
• W2010465009 hasConceptScore W2010465009C2779851234 @default.
• W2010465009 hasConceptScore W2010465009C49040817 @default.
• W2010465009 hasConceptScore W2010465009C56052488 @default.
• W2010465009 hasConceptScore W2010465009C8010536 @default.
• W2010465009 hasLocation W20104650091 @default.
• W2010465009 hasOpenAccess W2010465009 @default.
• W2010465009 hasPrimaryLocation W20104650091 @default.
• W2010465009 hasRelatedWork W1994108259 @default.
• W2010465009 hasRelatedWork W2007988725 @default.
• W2010465009 hasRelatedWork W2008696001 @default.
• W2010465009 hasRelatedWork W2035393703 @default.
• W2010465009 hasRelatedWork W2061930410 @default.
• W2010465009 hasRelatedWork W2068180043 @default.
• W2010465009 hasRelatedWork W2082384049 @default.
• W2010465009 hasRelatedWork W2135996144 @default.
• W2010465009 hasRelatedWork W2139476709 @default.
• W2010465009 hasRelatedWork W2152692271 @default.
• W2010465009 hasRelatedWork W2952815153 @default.
• W2010465009 hasRelatedWork W568647703 @default.
• W2010465009 hasRelatedWork W1549880612 @default.
• W2010465009 hasRelatedWork W2111477209 @default.
• W2010465009 hasRelatedWork W2259325876 @default.
• W2010465009 hasRelatedWork W2273739766 @default.
• W2010465009 hasRelatedWork W2402922105 @default.
• W2010465009 hasRelatedWork W2461410580 @default.
• W2010465009 hasRelatedWork W2854399578 @default.

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