FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010470266> ?p ?o ?g. }

• W2010470266 endingPage "B104" @default.
• W2010470266 startingPage "B104" @default.
• W2010470266 abstract "We demonstrate a compact interferometric lithography nanopatterning tool based on an amplitude division interferometer (ADI) and a 46.9 nm wavelength desktop size capillary discharge laser. The system is designed to print arrays of lines, holes, and dots with sizes below 100 nm on high resolution photoresists for the fabrication of arrays of nanostructures with physical and biological applications. The future combination of this ADI with high repetition rate tabletop lasers operating at shorter wavelengths should allow the printing of arrays of sub-10 nm size features with a tabletop setup." @default.
• W2010470266 created "2016-06-24" @default.
• W2010470266 creator A5017838587 @default.
• W2010470266 creator A5019564350 @default.
• W2010470266 creator A5042096325 @default.
• W2010470266 creator A5043942038 @default.
• W2010470266 creator A5047562447 @default.
• W2010470266 creator A5051486085 @default.
• W2010470266 creator A5055515591 @default.
• W2010470266 creator A5055523072 @default.
• W2010470266 creator A5075661672 @default.
• W2010470266 creator A5085987267 @default.
• W2010470266 date "2008-05-21" @default.
• W2010470266 modified "2023-09-26" @default.
• W2010470266 title "Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser" @default.
• W2010470266 cites W1668938604 @default.
• W2010470266 cites W1963906148 @default.
• W2010470266 cites W1973920755 @default.
• W2010470266 cites W1974374350 @default.
• W2010470266 cites W1976869999 @default.
• W2010470266 cites W1980282451 @default.
• W2010470266 cites W1988601632 @default.
• W2010470266 cites W1989089234 @default.
• W2010470266 cites W1990098652 @default.
• W2010470266 cites W1995373812 @default.
• W2010470266 cites W1998076508 @default.
• W2010470266 cites W2000195240 @default.
• W2010470266 cites W2008739391 @default.
• W2010470266 cites W2022352234 @default.
• W2010470266 cites W2030480660 @default.
• W2010470266 cites W2037465028 @default.
• W2010470266 cites W2042137161 @default.
• W2010470266 cites W2054460607 @default.
• W2010470266 cites W2061281712 @default.
• W2010470266 cites W2069992208 @default.
• W2010470266 cites W2078629230 @default.
• W2010470266 cites W2118888837 @default.
• W2010470266 cites W2130285841 @default.
• W2010470266 cites W2141734849 @default.
• W2010470266 cites W4234109392 @default.
• W2010470266 doi "https://doi.org/10.1364/josab.25.00b104" @default.
• W2010470266 hasPublicationYear "2008" @default.
• W2010470266 type Work @default.
• W2010470266 sameAs 2010470266 @default.
• W2010470266 citedByCount "14" @default.
• W2010470266 countsByYear W20104702662012 @default.
• W2010470266 countsByYear W20104702662013 @default.
• W2010470266 countsByYear W20104702662014 @default.
• W2010470266 countsByYear W20104702662015 @default.
• W2010470266 countsByYear W20104702662018 @default.
• W2010470266 countsByYear W20104702662019 @default.
• W2010470266 countsByYear W20104702662022 @default.
• W2010470266 countsByYear W20104702662023 @default.
• W2010470266 crossrefType "journal-article" @default.
• W2010470266 hasAuthorship W2010470266A5017838587 @default.
• W2010470266 hasAuthorship W2010470266A5019564350 @default.
• W2010470266 hasAuthorship W2010470266A5042096325 @default.
• W2010470266 hasAuthorship W2010470266A5043942038 @default.
• W2010470266 hasAuthorship W2010470266A5047562447 @default.
• W2010470266 hasAuthorship W2010470266A5051486085 @default.
• W2010470266 hasAuthorship W2010470266A5055515591 @default.
• W2010470266 hasAuthorship W2010470266A5055523072 @default.
• W2010470266 hasAuthorship W2010470266A5075661672 @default.
• W2010470266 hasAuthorship W2010470266A5085987267 @default.
• W2010470266 hasConcept C120665830 @default.
• W2010470266 hasConcept C121332964 @default.
• W2010470266 hasConcept C136525101 @default.
• W2010470266 hasConcept C142724271 @default.
• W2010470266 hasConcept C162996421 @default.
• W2010470266 hasConcept C163581340 @default.
• W2010470266 hasConcept C166689943 @default.
• W2010470266 hasConcept C171250308 @default.
• W2010470266 hasConcept C192562407 @default.
• W2010470266 hasConcept C200274948 @default.
• W2010470266 hasConcept C204223013 @default.
• W2010470266 hasConcept C204787440 @default.
• W2010470266 hasConcept C23576306 @default.
• W2010470266 hasConcept C2776798109 @default.
• W2010470266 hasConcept C2779227376 @default.
• W2010470266 hasConcept C49040817 @default.
• W2010470266 hasConcept C520434653 @default.
• W2010470266 hasConcept C53524968 @default.
• W2010470266 hasConcept C6260449 @default.
• W2010470266 hasConcept C71924100 @default.
• W2010470266 hasConceptScore W2010470266C120665830 @default.
• W2010470266 hasConceptScore W2010470266C121332964 @default.
• W2010470266 hasConceptScore W2010470266C136525101 @default.
• W2010470266 hasConceptScore W2010470266C142724271 @default.
• W2010470266 hasConceptScore W2010470266C162996421 @default.
• W2010470266 hasConceptScore W2010470266C163581340 @default.
• W2010470266 hasConceptScore W2010470266C166689943 @default.
• W2010470266 hasConceptScore W2010470266C171250308 @default.
• W2010470266 hasConceptScore W2010470266C192562407 @default.
• W2010470266 hasConceptScore W2010470266C200274948 @default.
• W2010470266 hasConceptScore W2010470266C204223013 @default.
• W2010470266 hasConceptScore W2010470266C204787440 @default.
• W2010470266 hasConceptScore W2010470266C23576306 @default.
• W2010470266 hasConceptScore W2010470266C2776798109 @default.

• next