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- W2010487503 abstract "Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 X 10-4/ degree(s)C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 X 10-5/ degree(s)C.© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2010487503 date "1996-01-10" @default.
- W2010487503 modified "2023-10-06" @default.
- W2010487503 title "Integrated optical ring resonator on silicon with thermal tuning and in-situ temperature measurement" @default.
- W2010487503 doi "https://doi.org/10.1117/12.229974" @default.
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