Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010567733> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2010567733 endingPage "917" @default.
- W2010567733 startingPage "914" @default.
- W2010567733 abstract "In the frame of the European project MAGIC, a massively multibeam tool working at 5 kV is under installation in LETI premises. Because of its high resolution capability and suitable high exposure dose, hydrogen silsesquioxane (HSQ) is a good candidate for evaluating tool performances. In order to prepare low voltage exposures on HSQ, we studied three process parameters that are post application bake (PAB) temperature, tetramethylammonium hydroxide (TMAH) based developer concentration and beam acceleration voltage, down to 5 kV. We combined those experiments with physico-chemical characterization in order to better understand resist reactions leading to measured contrast and base dose variations. As a starting point, we achieved 10 nm lines with a pitch of 60 nm at 100 kV. Thus we validated the high contrast capability of HSQ with our process parameters, with automatic coating and development track. By modifying PAB temperature and developer concentration, we found a suitable resist process for low voltage exposure. With proper process conditions, high resolution is achievable at 5 kV, with a lower exposure dose than at higher voltages." @default.
- W2010567733 created "2016-06-24" @default.
- W2010567733 creator A5013139227 @default.
- W2010567733 creator A5025570894 @default.
- W2010567733 creator A5025613305 @default.
- W2010567733 creator A5033680964 @default.
- W2010567733 creator A5060149780 @default.
- W2010567733 creator A5072219240 @default.
- W2010567733 creator A5073427918 @default.
- W2010567733 date "2010-05-01" @default.
- W2010567733 modified "2023-10-18" @default.
- W2010567733 title "Influence of process parameters on hydrogen silsesquioxane chemistry at low voltage electron beam exposures" @default.
- W2010567733 cites W1985976503 @default.
- W2010567733 cites W2002202432 @default.
- W2010567733 cites W2051349581 @default.
- W2010567733 cites W2053273008 @default.
- W2010567733 cites W2060654441 @default.
- W2010567733 cites W2083481954 @default.
- W2010567733 cites W2110641502 @default.
- W2010567733 doi "https://doi.org/10.1016/j.mee.2009.12.003" @default.
- W2010567733 hasPublicationYear "2010" @default.
- W2010567733 type Work @default.
- W2010567733 sameAs 2010567733 @default.
- W2010567733 citedByCount "6" @default.
- W2010567733 countsByYear W20105677332013 @default.
- W2010567733 countsByYear W20105677332016 @default.
- W2010567733 countsByYear W20105677332018 @default.
- W2010567733 crossrefType "journal-article" @default.
- W2010567733 hasAuthorship W2010567733A5013139227 @default.
- W2010567733 hasAuthorship W2010567733A5025570894 @default.
- W2010567733 hasAuthorship W2010567733A5025613305 @default.
- W2010567733 hasAuthorship W2010567733A5033680964 @default.
- W2010567733 hasAuthorship W2010567733A5060149780 @default.
- W2010567733 hasAuthorship W2010567733A5072219240 @default.
- W2010567733 hasAuthorship W2010567733A5073427918 @default.
- W2010567733 hasConcept C113196181 @default.
- W2010567733 hasConcept C119599485 @default.
- W2010567733 hasConcept C127413603 @default.
- W2010567733 hasConcept C128624480 @default.
- W2010567733 hasConcept C165801399 @default.
- W2010567733 hasConcept C171250308 @default.
- W2010567733 hasConcept C185592680 @default.
- W2010567733 hasConcept C192562407 @default.
- W2010567733 hasConcept C200274948 @default.
- W2010567733 hasConcept C2778339742 @default.
- W2010567733 hasConcept C2779227376 @default.
- W2010567733 hasConcept C2780127704 @default.
- W2010567733 hasConcept C43617362 @default.
- W2010567733 hasConcept C49040817 @default.
- W2010567733 hasConcept C53524968 @default.
- W2010567733 hasConcept C88182573 @default.
- W2010567733 hasConceptScore W2010567733C113196181 @default.
- W2010567733 hasConceptScore W2010567733C119599485 @default.
- W2010567733 hasConceptScore W2010567733C127413603 @default.
- W2010567733 hasConceptScore W2010567733C128624480 @default.
- W2010567733 hasConceptScore W2010567733C165801399 @default.
- W2010567733 hasConceptScore W2010567733C171250308 @default.
- W2010567733 hasConceptScore W2010567733C185592680 @default.
- W2010567733 hasConceptScore W2010567733C192562407 @default.
- W2010567733 hasConceptScore W2010567733C200274948 @default.
- W2010567733 hasConceptScore W2010567733C2778339742 @default.
- W2010567733 hasConceptScore W2010567733C2779227376 @default.
- W2010567733 hasConceptScore W2010567733C2780127704 @default.
- W2010567733 hasConceptScore W2010567733C43617362 @default.
- W2010567733 hasConceptScore W2010567733C49040817 @default.
- W2010567733 hasConceptScore W2010567733C53524968 @default.
- W2010567733 hasConceptScore W2010567733C88182573 @default.
- W2010567733 hasIssue "5-8" @default.
- W2010567733 hasLocation W20105677331 @default.
- W2010567733 hasOpenAccess W2010567733 @default.
- W2010567733 hasPrimaryLocation W20105677331 @default.
- W2010567733 hasRelatedWork W1966470393 @default.
- W2010567733 hasRelatedWork W1985270225 @default.
- W2010567733 hasRelatedWork W1996803388 @default.
- W2010567733 hasRelatedWork W2010567733 @default.
- W2010567733 hasRelatedWork W2026197969 @default.
- W2010567733 hasRelatedWork W2896667107 @default.
- W2010567733 hasRelatedWork W3145651840 @default.
- W2010567733 hasRelatedWork W4236271856 @default.
- W2010567733 hasRelatedWork W2043709205 @default.
- W2010567733 hasRelatedWork W2479781237 @default.
- W2010567733 hasVolume "87" @default.
- W2010567733 isParatext "false" @default.
- W2010567733 isRetracted "false" @default.
- W2010567733 magId "2010567733" @default.
- W2010567733 workType "article" @default.