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• W2010572588 endingPage "1874" @default.
• W2010572588 startingPage "1869" @default.
• W2010572588 abstract "The strain-sensitive X-ray two-dimensional reciprocal space mapping diffractrometry (2D-RSM) is employed to investigate the relaxation parameters and defect propagation in various thin relaxed buffer layers (RBLs) having a pure Ge top. In addition, we also studied the effect of in situ post-growth thermal treatments at an early growth stage of RBLs with low and intermediate Ge fraction. Both direct Ge epitaxy and multi-layer step-graded epitaxy have been adopted to grow these RBLs using chemical vapor deposition (CVD) at elevated partial pressure (around 10 Torr), which implies a much higher growth rate than RBLs grown using ultra-high vacuum CVD technique. Fully relaxed Ge top layers were obtained for both the direct Ge epitaxy, as well as for the step-graded technique. The results, when comparing these two techniques, favor the direct Ge epitaxy. However, the results of in situ post-growth annealing of the step-graded RBLs indicate a large reduction in the threading dislocations present in the grading regions without a change of relaxation degree or Ge% incorporation in that region." @default.
• W2010572588 created "2016-06-24" @default.
• W2010572588 creator A5007472106 @default.
• W2010572588 creator A5013019405 @default.
• W2010572588 creator A5018591281 @default.
• W2010572588 creator A5031220453 @default.
• W2010572588 creator A5071078661 @default.
• W2010572588 creator A5074258399 @default.
• W2010572588 creator A5078044121 @default.
• W2010572588 creator A5082255859 @default.
• W2010572588 date "2001-11-01" @default.
• W2010572588 modified "2023-10-03" @default.
• W2010572588 title "Direct assessment of relaxation and defect propagation in different as-grown and in situ post-growth annealed thin Ge/Si and step-graded Si1−xGex/Si buffer layers" @default.
• W2010572588 cites W1644048013 @default.
• W2010572588 cites W1969950458 @default.
• W2010572588 cites W1973581394 @default.
• W2010572588 cites W1979389222 @default.
• W2010572588 cites W1984310554 @default.
• W2010572588 cites W1998158114 @default.
• W2010572588 cites W2000999566 @default.
• W2010572588 cites W2038658940 @default.
• W2010572588 cites W2043419975 @default.
• W2010572588 cites W2057875422 @default.
• W2010572588 cites W2059444897 @default.
• W2010572588 cites W2060997852 @default.
• W2010572588 cites W2117333941 @default.
• W2010572588 cites W2147503814 @default.
• W2010572588 doi "https://doi.org/10.1016/s0038-1101(01)00225-8" @default.
• W2010572588 hasPublicationYear "2001" @default.
• W2010572588 type Work @default.
• W2010572588 sameAs 2010572588 @default.
• W2010572588 citedByCount "13" @default.
• W2010572588 countsByYear W20105725882014 @default.
• W2010572588 crossrefType "journal-article" @default.
• W2010572588 hasAuthorship W2010572588A5007472106 @default.
• W2010572588 hasAuthorship W2010572588A5013019405 @default.
• W2010572588 hasAuthorship W2010572588A5018591281 @default.
• W2010572588 hasAuthorship W2010572588A5031220453 @default.
• W2010572588 hasAuthorship W2010572588A5071078661 @default.
• W2010572588 hasAuthorship W2010572588A5074258399 @default.
• W2010572588 hasAuthorship W2010572588A5078044121 @default.
• W2010572588 hasAuthorship W2010572588A5082255859 @default.
• W2010572588 hasConcept C110738630 @default.
• W2010572588 hasConcept C113196181 @default.
• W2010572588 hasConcept C120665830 @default.
• W2010572588 hasConcept C121332964 @default.
• W2010572588 hasConcept C159985019 @default.
• W2010572588 hasConcept C171250308 @default.
• W2010572588 hasConcept C178790620 @default.
• W2010572588 hasConcept C185592680 @default.
• W2010572588 hasConcept C19067145 @default.
• W2010572588 hasConcept C192562407 @default.
• W2010572588 hasConcept C207114421 @default.
• W2010572588 hasConcept C2777822432 @default.
• W2010572588 hasConcept C2777855556 @default.
• W2010572588 hasConcept C2779227376 @default.
• W2010572588 hasConcept C43617362 @default.
• W2010572588 hasConcept C49040817 @default.
• W2010572588 hasConcept C544956773 @default.
• W2010572588 hasConcept C550623735 @default.
• W2010572588 hasConcept C57410435 @default.
• W2010572588 hasConcept C8010536 @default.
• W2010572588 hasConcept C89957378 @default.
• W2010572588 hasConceptScore W2010572588C110738630 @default.
• W2010572588 hasConceptScore W2010572588C113196181 @default.
• W2010572588 hasConceptScore W2010572588C120665830 @default.
• W2010572588 hasConceptScore W2010572588C121332964 @default.
• W2010572588 hasConceptScore W2010572588C159985019 @default.
• W2010572588 hasConceptScore W2010572588C171250308 @default.
• W2010572588 hasConceptScore W2010572588C178790620 @default.
• W2010572588 hasConceptScore W2010572588C185592680 @default.
• W2010572588 hasConceptScore W2010572588C19067145 @default.
• W2010572588 hasConceptScore W2010572588C192562407 @default.
• W2010572588 hasConceptScore W2010572588C207114421 @default.
• W2010572588 hasConceptScore W2010572588C2777822432 @default.
• W2010572588 hasConceptScore W2010572588C2777855556 @default.
• W2010572588 hasConceptScore W2010572588C2779227376 @default.
• W2010572588 hasConceptScore W2010572588C43617362 @default.
• W2010572588 hasConceptScore W2010572588C49040817 @default.
• W2010572588 hasConceptScore W2010572588C544956773 @default.
• W2010572588 hasConceptScore W2010572588C550623735 @default.
• W2010572588 hasConceptScore W2010572588C57410435 @default.
• W2010572588 hasConceptScore W2010572588C8010536 @default.
• W2010572588 hasConceptScore W2010572588C89957378 @default.
• W2010572588 hasIssue "11" @default.
• W2010572588 hasLocation W20105725881 @default.
• W2010572588 hasOpenAccess W2010572588 @default.
• W2010572588 hasPrimaryLocation W20105725881 @default.
• W2010572588 hasRelatedWork W1667618841 @default.
• W2010572588 hasRelatedWork W1983540218 @default.
• W2010572588 hasRelatedWork W1997316964 @default.
• W2010572588 hasRelatedWork W2005550021 @default.
• W2010572588 hasRelatedWork W2049834439 @default.
• W2010572588 hasRelatedWork W2068853528 @default.
• W2010572588 hasRelatedWork W2081942093 @default.
• W2010572588 hasRelatedWork W2461523396 @default.
• W2010572588 hasRelatedWork W4200206782 @default.
• W2010572588 hasRelatedWork W770500221 @default.

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