Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010634435> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2010634435 endingPage "2330" @default.
- W2010634435 startingPage "2325" @default.
- W2010634435 abstract "The quality of organic low-k methylsilsesquioxane (MSQ) film is degraded by the damage of oxygen plasma and hygroscopic behavior during photoresist stripping. In addition, the interaction between MSQ and copper is worth investigating. In this work, we have studied the H2 plasma treatment to improve the quality and enhance the copper penetration resistance of MSQ. Experimental results show the leakage current of MSQ decreases as the H2 plasma treatment time is increased. The dielectric constant of treated samples also remains constant (∼2.7). In addition, the copper diffusion resistance of MSQ film is significantly promoted. The H2 plasma treatment can provide additional hydrogen to passivate the inner structure of porous MSQ film as well as reduce the probability of moisture uptake and interaction with Cu atoms. Therefore, the low-k dielectric properties of MSQ are significantly enhanced by H2 plasma treatment." @default.
- W2010634435 created "2016-06-24" @default.
- W2010634435 creator A5002327772 @default.
- W2010634435 creator A5005337863 @default.
- W2010634435 creator A5014223462 @default.
- W2010634435 creator A5040148345 @default.
- W2010634435 creator A5046730456 @default.
- W2010634435 creator A5050297194 @default.
- W2010634435 creator A5057124065 @default.
- W2010634435 date "1999-09-01" @default.
- W2010634435 modified "2023-10-17" @default.
- W2010634435 title "Effects of H2 plasma treatment on low dielectric constant methylsilsesquioxane" @default.
- W2010634435 cites W1979525535 @default.
- W2010634435 cites W1998033079 @default.
- W2010634435 cites W2010631951 @default.
- W2010634435 cites W2050953286 @default.
- W2010634435 cites W2078204252 @default.
- W2010634435 doi "https://doi.org/10.1116/1.590912" @default.
- W2010634435 hasPublicationYear "1999" @default.
- W2010634435 type Work @default.
- W2010634435 sameAs 2010634435 @default.
- W2010634435 citedByCount "50" @default.
- W2010634435 countsByYear W20106344352012 @default.
- W2010634435 countsByYear W20106344352013 @default.
- W2010634435 countsByYear W20106344352014 @default.
- W2010634435 countsByYear W20106344352021 @default.
- W2010634435 countsByYear W20106344352022 @default.
- W2010634435 crossrefType "journal-article" @default.
- W2010634435 hasAuthorship W2010634435A5002327772 @default.
- W2010634435 hasAuthorship W2010634435A5005337863 @default.
- W2010634435 hasAuthorship W2010634435A5014223462 @default.
- W2010634435 hasAuthorship W2010634435A5040148345 @default.
- W2010634435 hasAuthorship W2010634435A5046730456 @default.
- W2010634435 hasAuthorship W2010634435A5050297194 @default.
- W2010634435 hasAuthorship W2010634435A5057124065 @default.
- W2010634435 hasConcept C113196181 @default.
- W2010634435 hasConcept C121332964 @default.
- W2010634435 hasConcept C133386390 @default.
- W2010634435 hasConcept C134406635 @default.
- W2010634435 hasConcept C159985019 @default.
- W2010634435 hasConcept C178790620 @default.
- W2010634435 hasConcept C185592680 @default.
- W2010634435 hasConcept C191897082 @default.
- W2010634435 hasConcept C192562407 @default.
- W2010634435 hasConcept C2779227376 @default.
- W2010634435 hasConcept C33574316 @default.
- W2010634435 hasConcept C49040817 @default.
- W2010634435 hasConcept C512968161 @default.
- W2010634435 hasConcept C544778455 @default.
- W2010634435 hasConcept C62520636 @default.
- W2010634435 hasConcept C82706917 @default.
- W2010634435 hasConceptScore W2010634435C113196181 @default.
- W2010634435 hasConceptScore W2010634435C121332964 @default.
- W2010634435 hasConceptScore W2010634435C133386390 @default.
- W2010634435 hasConceptScore W2010634435C134406635 @default.
- W2010634435 hasConceptScore W2010634435C159985019 @default.
- W2010634435 hasConceptScore W2010634435C178790620 @default.
- W2010634435 hasConceptScore W2010634435C185592680 @default.
- W2010634435 hasConceptScore W2010634435C191897082 @default.
- W2010634435 hasConceptScore W2010634435C192562407 @default.
- W2010634435 hasConceptScore W2010634435C2779227376 @default.
- W2010634435 hasConceptScore W2010634435C33574316 @default.
- W2010634435 hasConceptScore W2010634435C49040817 @default.
- W2010634435 hasConceptScore W2010634435C512968161 @default.
- W2010634435 hasConceptScore W2010634435C544778455 @default.
- W2010634435 hasConceptScore W2010634435C62520636 @default.
- W2010634435 hasConceptScore W2010634435C82706917 @default.
- W2010634435 hasIssue "5" @default.
- W2010634435 hasLocation W20106344351 @default.
- W2010634435 hasOpenAccess W2010634435 @default.
- W2010634435 hasPrimaryLocation W20106344351 @default.
- W2010634435 hasRelatedWork W1994753809 @default.
- W2010634435 hasRelatedWork W2023097091 @default.
- W2010634435 hasRelatedWork W2036982044 @default.
- W2010634435 hasRelatedWork W2043673973 @default.
- W2010634435 hasRelatedWork W2093831900 @default.
- W2010634435 hasRelatedWork W2137307547 @default.
- W2010634435 hasRelatedWork W2380293314 @default.
- W2010634435 hasRelatedWork W2943188944 @default.
- W2010634435 hasRelatedWork W3082440218 @default.
- W2010634435 hasRelatedWork W2033123884 @default.
- W2010634435 hasVolume "17" @default.
- W2010634435 isParatext "false" @default.
- W2010634435 isRetracted "false" @default.
- W2010634435 magId "2010634435" @default.
- W2010634435 workType "article" @default.