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- W2010640260 abstract "A vibration-insensitive interferometer with simple structure is proposed. Under normal incidence, both the reflection phase and magnitude of the thin film at different wavelengths were measured and utilized to calculate refractive index and thickness of the thin film. The experiment results showed the precisions were obviously increased after the phase measurements were added into analysis." @default.
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- W2010640260 date "2011-05-23" @default.
- W2010640260 modified "2023-10-18" @default.
- W2010640260 title "Three-dimensional refractive index and thickness distribution of thin film measurements through dynamic multiwavelength interferometry" @default.
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- W2010640260 doi "https://doi.org/10.1117/12.890255" @default.
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