Matches in SemOpenAlex for { <https://semopenalex.org/work/W2010657805> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2010657805 abstract "SiC material is of intense interest because of its unique features. Two samples of SiC/Si heterostructures were prepared by ion beam synthesis (IBS) with metal vapor vacuum arc ion source at an energy of 65keV and a dose of 1.0 by 10<SUP>18</SUP> cm<SUP>-2</SUP>. After implantation, one sample was annealed in nitrogen ambient at 1250 degrees C for 10 hours. Spectroscopic ellipsometry (SE) was then performed to study these two samples with the wavelength range of 400-2000nm at a fixed angle of incidence. For the interpretation of SE spectra, the material and optical properties of the annealed sample had been derived. SE result confirmed the formation of a thick buried SiC layer for the annealed sample, but the optical property of this buried layer was found to be different from that of bulk SiC material even if a long time annealing at high temperature was performed. These results were further substantiated by other techniques, including FTIR, XPS and RBS. For the as-implanted sample, different models had been tried but they were not reasonable enough to fit the SE spectra well, the point was how to simulate the optical response of the free carbon atoms distributed in the sample. Further investigation is needed." @default.
- W2010657805 created "2016-06-24" @default.
- W2010657805 creator A5000332685 @default.
- W2010657805 creator A5001209399 @default.
- W2010657805 creator A5021493758 @default.
- W2010657805 date "1998-08-10" @default.
- W2010657805 modified "2023-10-06" @default.
- W2010657805 title "<title>Spectroellipsometric study of SiC/Si heterostructures produced by MEVVA implantation</title>" @default.
- W2010657805 doi "https://doi.org/10.1117/12.318356" @default.
- W2010657805 hasPublicationYear "1998" @default.
- W2010657805 type Work @default.
- W2010657805 sameAs 2010657805 @default.
- W2010657805 citedByCount "0" @default.
- W2010657805 crossrefType "proceedings-article" @default.
- W2010657805 hasAuthorship W2010657805A5000332685 @default.
- W2010657805 hasAuthorship W2010657805A5001209399 @default.
- W2010657805 hasAuthorship W2010657805A5021493758 @default.
- W2010657805 hasConcept C113196181 @default.
- W2010657805 hasConcept C121332964 @default.
- W2010657805 hasConcept C1276947 @default.
- W2010657805 hasConcept C145148216 @default.
- W2010657805 hasConcept C159985019 @default.
- W2010657805 hasConcept C171250308 @default.
- W2010657805 hasConcept C175708663 @default.
- W2010657805 hasConcept C178790620 @default.
- W2010657805 hasConcept C18293161 @default.
- W2010657805 hasConcept C185592680 @default.
- W2010657805 hasConcept C19067145 @default.
- W2010657805 hasConcept C192562407 @default.
- W2010657805 hasConcept C22423302 @default.
- W2010657805 hasConcept C2777855556 @default.
- W2010657805 hasConcept C2780722187 @default.
- W2010657805 hasConcept C41823505 @default.
- W2010657805 hasConcept C43617362 @default.
- W2010657805 hasConcept C44441586 @default.
- W2010657805 hasConcept C46141821 @default.
- W2010657805 hasConcept C4839761 @default.
- W2010657805 hasConcept C49040817 @default.
- W2010657805 hasConcept C50774322 @default.
- W2010657805 hasConcept C62520636 @default.
- W2010657805 hasConcept C79794668 @default.
- W2010657805 hasConcept C82706917 @default.
- W2010657805 hasConceptScore W2010657805C113196181 @default.
- W2010657805 hasConceptScore W2010657805C121332964 @default.
- W2010657805 hasConceptScore W2010657805C1276947 @default.
- W2010657805 hasConceptScore W2010657805C145148216 @default.
- W2010657805 hasConceptScore W2010657805C159985019 @default.
- W2010657805 hasConceptScore W2010657805C171250308 @default.
- W2010657805 hasConceptScore W2010657805C175708663 @default.
- W2010657805 hasConceptScore W2010657805C178790620 @default.
- W2010657805 hasConceptScore W2010657805C18293161 @default.
- W2010657805 hasConceptScore W2010657805C185592680 @default.
- W2010657805 hasConceptScore W2010657805C19067145 @default.
- W2010657805 hasConceptScore W2010657805C192562407 @default.
- W2010657805 hasConceptScore W2010657805C22423302 @default.
- W2010657805 hasConceptScore W2010657805C2777855556 @default.
- W2010657805 hasConceptScore W2010657805C2780722187 @default.
- W2010657805 hasConceptScore W2010657805C41823505 @default.
- W2010657805 hasConceptScore W2010657805C43617362 @default.
- W2010657805 hasConceptScore W2010657805C44441586 @default.
- W2010657805 hasConceptScore W2010657805C46141821 @default.
- W2010657805 hasConceptScore W2010657805C4839761 @default.
- W2010657805 hasConceptScore W2010657805C49040817 @default.
- W2010657805 hasConceptScore W2010657805C50774322 @default.
- W2010657805 hasConceptScore W2010657805C62520636 @default.
- W2010657805 hasConceptScore W2010657805C79794668 @default.
- W2010657805 hasConceptScore W2010657805C82706917 @default.
- W2010657805 hasLocation W20106578051 @default.
- W2010657805 hasOpenAccess W2010657805 @default.
- W2010657805 hasPrimaryLocation W20106578051 @default.
- W2010657805 hasRelatedWork W1996265291 @default.
- W2010657805 hasRelatedWork W2078482945 @default.
- W2010657805 hasRelatedWork W2092149643 @default.
- W2010657805 hasRelatedWork W2111376249 @default.
- W2010657805 hasRelatedWork W2132411709 @default.
- W2010657805 hasRelatedWork W213848383 @default.
- W2010657805 hasRelatedWork W2366815809 @default.
- W2010657805 hasRelatedWork W2635482596 @default.
- W2010657805 hasRelatedWork W2956576485 @default.
- W2010657805 hasRelatedWork W3126147234 @default.
- W2010657805 isParatext "false" @default.
- W2010657805 isRetracted "false" @default.
- W2010657805 magId "2010657805" @default.
- W2010657805 workType "article" @default.