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- W2010683197 abstract "The advent of ultra-large and giga-scale-integration (ULSI/GSI) has placed considerable emphasis on the development of new gate oxides and interlevel dielectrics capable of meeting strict performance and reliability requirements. The costs and demands associated with ULSI fabrication have in turn fueled the need for cost-effective, rapid and accurate in-line characterization techniques for evaluating dielectric quality. The use of non-contact surface photovoltage characterization techniques provides cost-effective rapid feedback on dielectric quality, reducing costs through the reutilization of control wafers and the elimination of processing time. This technology has been applied to characterize most of the relevant C-V parameters, including flatband voltage (V<SUB>fb</SUB>), density of interface traps (D<SUB>it</SUB>), mobile charge density (Q<SUB>m</SUB>), oxide thickness (T<SUB>ox</SUB>), oxide resistivity (p<SUB>ox</SUB>) and total charge (Q<SUB>tot</SUB>) for gate and interlevel (ILO) oxides. A novel method of measuring tunneling voltage by this technique on various gate oxides is discussed. For ILO, PECVD and high density plasma dielectrics, surface voltage maps are also presented. Measurements of near-surface silicon quality are described, including minority carrier generation lifetime, and examples of their application in diagnosing manufacturing problems." @default.
- W2010683197 created "2016-06-24" @default.
- W2010683197 creator A5004776188 @default.
- W2010683197 creator A5062841020 @default.
- W2010683197 creator A5081165202 @default.
- W2010683197 creator A5089228091 @default.
- W2010683197 date "1997-09-02" @default.
- W2010683197 modified "2023-09-23" @default.
- W2010683197 title "<title>In-line charge-trapping characterization of dielectrics for sub-0.5-um CMOS technologies</title>" @default.
- W2010683197 doi "https://doi.org/10.1117/12.284669" @default.
- W2010683197 hasPublicationYear "1997" @default.
- W2010683197 type Work @default.
- W2010683197 sameAs 2010683197 @default.
- W2010683197 citedByCount "1" @default.
- W2010683197 crossrefType "proceedings-article" @default.
- W2010683197 hasAuthorship W2010683197A5004776188 @default.
- W2010683197 hasAuthorship W2010683197A5062841020 @default.
- W2010683197 hasAuthorship W2010683197A5081165202 @default.
- W2010683197 hasAuthorship W2010683197A5089228091 @default.
- W2010683197 hasConcept C119599485 @default.
- W2010683197 hasConcept C121332964 @default.
- W2010683197 hasConcept C127413603 @default.
- W2010683197 hasConcept C133386390 @default.
- W2010683197 hasConcept C160671074 @default.
- W2010683197 hasConcept C163258240 @default.
- W2010683197 hasConcept C165801399 @default.
- W2010683197 hasConcept C166972891 @default.
- W2010683197 hasConcept C171250308 @default.
- W2010683197 hasConcept C172385210 @default.
- W2010683197 hasConcept C192562407 @default.
- W2010683197 hasConcept C24326235 @default.
- W2010683197 hasConcept C2780841128 @default.
- W2010683197 hasConcept C43214815 @default.
- W2010683197 hasConcept C46362747 @default.
- W2010683197 hasConcept C49040817 @default.
- W2010683197 hasConcept C61696701 @default.
- W2010683197 hasConcept C62520636 @default.
- W2010683197 hasConceptScore W2010683197C119599485 @default.
- W2010683197 hasConceptScore W2010683197C121332964 @default.
- W2010683197 hasConceptScore W2010683197C127413603 @default.
- W2010683197 hasConceptScore W2010683197C133386390 @default.
- W2010683197 hasConceptScore W2010683197C160671074 @default.
- W2010683197 hasConceptScore W2010683197C163258240 @default.
- W2010683197 hasConceptScore W2010683197C165801399 @default.
- W2010683197 hasConceptScore W2010683197C166972891 @default.
- W2010683197 hasConceptScore W2010683197C171250308 @default.
- W2010683197 hasConceptScore W2010683197C172385210 @default.
- W2010683197 hasConceptScore W2010683197C192562407 @default.
- W2010683197 hasConceptScore W2010683197C24326235 @default.
- W2010683197 hasConceptScore W2010683197C2780841128 @default.
- W2010683197 hasConceptScore W2010683197C43214815 @default.
- W2010683197 hasConceptScore W2010683197C46362747 @default.
- W2010683197 hasConceptScore W2010683197C49040817 @default.
- W2010683197 hasConceptScore W2010683197C61696701 @default.
- W2010683197 hasConceptScore W2010683197C62520636 @default.
- W2010683197 hasLocation W20106831971 @default.
- W2010683197 hasOpenAccess W2010683197 @default.
- W2010683197 hasPrimaryLocation W20106831971 @default.
- W2010683197 hasRelatedWork W1561253851 @default.
- W2010683197 hasRelatedWork W1643500588 @default.
- W2010683197 hasRelatedWork W2055048006 @default.
- W2010683197 hasRelatedWork W2076002219 @default.
- W2010683197 hasRelatedWork W2139774918 @default.
- W2010683197 hasRelatedWork W2139890664 @default.
- W2010683197 hasRelatedWork W2347646477 @default.
- W2010683197 hasRelatedWork W2583113332 @default.
- W2010683197 hasRelatedWork W4230922091 @default.
- W2010683197 hasRelatedWork W4249287129 @default.
- W2010683197 isParatext "false" @default.
- W2010683197 isRetracted "false" @default.
- W2010683197 magId "2010683197" @default.
- W2010683197 workType "article" @default.